Radiative properties of anisotropic microrough silicon surfaces

38th AIAA Thermophysics Conference

Volumn , Issue , 2005, Pages

  Lee, H J ^a   Zhu, Q Z ^a   Zhang, Z M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DISTRIBUTION FUNCTIONS; HEAT RADIATION; INDUSTRIAL RESEARCH; METEOROLOGICAL INSTRUMENTS; MONTE CARLO METHODS; RAPID THERMAL PROCESSING; RAY TRACING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; TEMPERATURE MEASUREMENT; TOPOGRAPHY;

ANISOTROPIC SURFACES; BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTIONS; MICROROUGH SILICON SURFACES; MONTE CARLO RAY TRACING METHOD; RADIATIVE PROPERTIES; RADIOMETRIC TEMPERATURE MEASUREMENT; SEMICONDUCTOR MANUFACTURING INDUSTRY; SLOPE DISTRIBUTION;

ANISOTROPY;

EID: 85085403444     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2005-5209     Document Type: Conference Paper

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