Big data analytics for smart manufacturing: Case studies in semiconductor manufacturing

Processes

Volumn 5, Issue 3, 2017, Pages

  Moyne, James ^a   Iskandar, Jimmy ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Anomaly detection; Big data; Predictive analytics; Predictive maintenance; Process control; Semiconductor manufacturing; Smart manufacturing

Indexed keywords

EID: 85031732681     PISSN: None     EISSN: 22279717     Source Type: Journal    
DOI: 10.3390/pr5030039     Document Type: Article

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