Advance process control solutions for semiconductor manufacturing

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2002, Pages 101-106

  Sarfaty, Moshe ^a   Shanmugasundram, Arulkumar ^a   Schwarm, Alexander ^a   Paik, Joseph ^a   Zhang, Jimin ^a   Pan, Rong ^a   Seamons, Martin J ^a   Li, Howard ^a   Hung, Raymond ^a   Parikh, Suketu ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Advance process control; Feed forward; Feedback; Process model; Process module

Indexed keywords

ALGORITHMS; CONTROL SYSTEM SYNTHESIS; FEEDBACK CONTROL; OPTIMAL CONTROL SYSTEMS; PRECISION ENGINEERING; PRODUCTION CONTROL; STATISTICAL PROCESS CONTROL;

ADVANCED PROCESS CONTROL; MULTIPROCESS MODULES; REAL TIME PROCESS CONTROL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036078265     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)