Parametric Resonance in Electrostatically Actuated Micromirrors

IEEE Transactions on Industrial Electronics

Volumn 64, Issue 2, 2017, Pages 1544-1551

  Frangi, Attilio ^a   Guerrieri, Andrea ^a   Carminati, Roberto ^b   Mendicino, Gianluca ^a  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Continuation approaches; Mathieu equation; micromirrors; microoptoelectromechanical systems (MOEMS); parametric resonance

Indexed keywords

ELECTROSTATIC ACTUATORS; MOEMS; PARAMETRIC DEVICES;

CONTINUATION APPROACHES; MATHIEU EQUATION; MICRO MIRROR; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; PARAMETRIC RESONANCE;

RESONANCE;

EID: 85017277685     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2016.2615274     Document Type: Article

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