Parametrically amplified Z-axis lorentz force magnetometer

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 702-710

  Thompson, Matthew J ^a,b   Horsley, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Invensense Inc   (United States)

Author keywords

Force measurement; magnetometers; microelectromechanical devices; navigation; parametric amplifiers

Indexed keywords

ANGULAR RESOLUTION; BROWNIAN NOISE; DRIVE SIGNAL; FEED THROUGH; FIELD RESOLUTION; FIELD SENSITIVITY; FORCE MAGNETOMETERS; FULLY COMPATIBLE; LORENTZ; MEMS INERTIAL SENSORS; MICRO-ELECTRO-MECHANICAL; MICROELECTROMECHANICAL SYSTEMS; PARAMETRIC AMPLIFICATION;

BROWNIAN MOVEMENT; COMPOSITE MICROMECHANICS; FABRICATION; INTERNET PROTOCOLS; LORENTZ FORCE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE AMPLIFIERS; NAVIGATION; PARAMETRIC AMPLIFIERS;

MAGNETOMETERS;

EID: 79957995789     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2140355     Document Type: Article

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