SCOPUS 정보 검색 플랫폼

Volumn 2, Issue 9, 2014, Pages

Thickness determination of few-layer hexagonal boron nitride films by scanning electron microscopy and Auger electron spectroscopy

(2) Sutter, P a Sutter, E a

a BROOKHAVEN NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; AUGERS; BORON NITRIDE; DIELECTRIC MATERIALS; ELECTRONS; III-V SEMICONDUCTORS; NITRIDES; SCANNING ELECTRON MICROSCOPY; THICKNESS GAGES; THICKNESS MEASUREMENT;

ATOMIC LAYERS THICKNESS; AUGER ELECTRON SPECTROSCOPIES (AES); ELECTRON ESCAPE DEPTH; HEXAGONAL BORON NITRIDE (H-BN); HEXAGONAL BORON NITRIDE FILMS; LAYERED DIELECTRICS; THICKNESS DETERMINATION; TWO-DIMENSIONAL MATERIALS;

GRAPHENE;

EID: 85006043574 PISSN: None EISSN: 2166532X Source Type: Journal
DOI: 10.1063/1.4889815 Document Type: Article

Times cited : (27)

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