Polymer-free graphene transfer for enhanced reliability of graphene field-effect transistors

2D Materials

Volumn 3, Issue 2, 2016, Pages

  Park, Hamin ^a   Park, Ick Joon ^a   Jung, Dae Yool ^a   Lee, Khang June ^a   Yang, Sang Yoon ^a   Choi, Sung Yool ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Bias stress induced instability; Graphene field effect transistor; Graphene transfer; PMMA residue

Indexed keywords

ATOMIC FORCE MICROSCOPY; CATALYSTS; CHEMICAL VAPOR DEPOSITION; GRAPHENE; GRAPHENE TRANSISTORS; POLYMER FILMS; RELIABILITY ANALYSIS;

BIAS STRESS; GRAPHENE FIELD EFFECT TRANSISTOR (GFETS); GRAPHENE FIELD-EFFECT TRANSISTORS; GRAPHENE PROPERTIES; INTRINSIC ELECTRICAL PROPERTY; PMMA RESIDUE; POLYMER MATERIALS; TRANSFER TECHNIQUE;

FIELD EFFECT TRANSISTORS;

EID: 84977633060     PISSN: None     EISSN: 20531583     Source Type: Journal    
DOI: 10.1088/2053-1583/3/2/021003     Document Type: Article

References (38)

1. Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV and Firsov A A 2004 Electric field effect in atomically thin carbon films Science 306 666-9
2. Novoselov KS, Jiang D, Schedin F, Booth T J, Khotkevich VV, Morozov SV and Geim AK 2005 Two-dimensional atomic crystals Proc. Natl Acad. Sci. USA 102 10451-3
3. Zhang Y B, Tan YW, Stormer HL and Kim P 2005 Experimental observation of the quantum Hall effect and Berry's phase in graphene Nature 438 201-4
4. Geim AK and Novoselov KS 2007 The rise of graphene Nat. Mater. 6 183-91
5. Geim AK 2009 Graphene: status and prospects Science 324 1530-4
6. Kim KS, Zhao Y, Jang H, Lee S Y, Kim JM, Kim KS, Ahn JH, Kim P, Choi J Y and Hong BH 2009 Large-scale pattern growth of graphene films for stretchable transparent electrodes Nature 457 706-10
7. Li XS et al 2009 Large-area synthesis of high-quality and uniform graphene films on copper foils Science 324 1312-4
8. Li XS et al 2010 Graphene films with large domain size by a two-step chemical vapor deposition process Nano Lett. 10 4328-34
9. Chen S S, Ji HX, Chou H, Li QY, Li HY, Suk JW, Piner R, Liao L, Cai WW and Ruoff R S 2013 Millimeter-size singlecrystal graphene by suppressing evaporative loss of Cu during low pressure chemical vapor deposition Adv. Mater. 25 2062-5
10. Yang S Y, Oh J G, Jung DY, Choi H, Yu CH, Shin J, Choi CG, Cho B J and Choi S Y 2015 Metal-etching-free direct delamination and transfer of single-layer graphene with a high degree of freedom Small 11 175-81
11. Na S R, Suk JW, Tao L, Akinwande D, Ruoff R S, Huang R and Liechti KM 2015 Selective mechanical transfer of graphene from seed copper foil using rate effects ACS Nano 9 1325-35
12. Vicarelli L, Vitiello MS, Coquillat D, Lombardo A, Ferrari AC, Knap W, Polini M, Pellegrini V and Tredicucci A 2012 Graphene field-effect transistors as room-temperature terahertz detectors Nat. Mater. 11 865-71
13. Lee SH et al 2012 Switching terahertz waves with gatecontrolled active graphene metamaterials Nat. Mater. 11 936-41
14. Choi H et al 2014 Flexible and transparent gas molecule sensor integrated with sensing and heating graphene layers Small 10 3685-91
15. Jung W, Kim D, Lee M, Kim S, Kim JH and Han CS 2014 Ultraconformal contact transfer of monolayer graphene on metal to various substrates Adv. Mater. 26 6394-400
16. Kim K, Bae SH, Toh CT, Kim H, Cho JH, Whang D, Lee TW, Ozyilmaz B and Ahn JH 2014 Ultrathin organic solar cells with graphene doped by ferroelectric polarization ACS Appl. Mater. Interfaces 6 3299-304
17. Abhilash T S, De Alba R, Zhelev N, Craighead HG and Parpia JM 2015 Transfer printing of CVDgraphene FETs on patterned substrates Nanoscale 7 14109-13
18. Li XS, Zhu YW, Cai WW, Borysiak M, Han B Y, Chen D, Piner RD, Colombo L and Ruoff R S 2009 Transfer of largearea graphene films for high-performance transparent conductive electrodes Nano Lett. 9 4359-63
19. Suk JW, Kitt A, Magnuson CW, Hao Y F, Ahmed S, An JH, Swan AK, Goldberg B B and Ruoff R S 2011 Transfer of CVDgrown monolayer graphene onto arbitrary substrates ACS Nano 5 6916-24
20. Song J, Kam F Y, Png RQ, Seah WL, Zhuo JM, Lim GK, Ho PKH and Chua L L 2013 Ageneral method for transferring graphene onto soft surfaces Nat. Nanotechnol. 8 356-62
21. Cheng ZG, Zhou QY, Wang CX, Li QA, Wang C and Fang Y 2011 Toward intrinsic graphene surfaces: a systematic study on thermal annealing and wet-chemical treatment of SiO2-supported graphene devices Nano Lett. 11 767-71
22. 2 Appl. Phys. Lett. 99 122108
23. Lin YC, Lu CC, Yeh CH, Jin CH, Suenaga K and Chiu PW 2012 Graphene annealing: how clean can it be? Nano Lett. 12 414-9
24. Suk JW, Lee WH, Lee J, Chou H, Piner RD, Hao Y F, Akinwande D and Ruoff R S 2013 Enhancement of the electrical properties of graphene grown by chemical vapor deposition via controlling the effects of polymer residue Nano Lett. 13 1462-7
25. Chan J, Venugopal A, Pirkle A, McDonnell S, Hinojos D, Magnuson CW, Ruoff R S, Colombo L, Wallace RM and Vogel EM 2012 Reducing extrinsic performance-limiting factors in graphene grown by chemical vapor deposition ACS Nano 6 3224-9
26. Ambrosi A and Pumera M 2014 The CVDgraphene transfer procedure introduces metallic impurities which alter the graphene electrochemical properties Nanoscale 6 472-6
27. Regan W, Alem N, Aleman B, Geng B S, Girit C, Maserati L, Wang F, Crommie M and Zettl A 2010 A direct transfer of layer-area graphene Appl. Phys. Lett. 96 113102
28. Wang DY et al 2013 Clean-lifting transfer of large-area residual-free graphene films Adv. Mater. 25 4521-6
29. Lin WH, Chen TH, Chang JK, Taur J I, Lo Y Y, Lee WL, Chang CS, Su WB and Wu CI 2014 A direct and polymer-free method for transferring graphene grown by chemical vapor deposition to any substrate ACS Nano 8 1784-91
30. Shinde SM, Kalita G, Sharma S, Zulkifli Z, Papon R and Tanemura M 2015 Polymer-free graphene transfer on moldable cellulose acetate based paper by hot press technique Surf. Coat. Technol. 275 369-73
31. Fan J Y, Michalik JM, Casado L, Roddaro S, Ibarra MR and De Teresa JM 2011 Investigation of the influence on graphene by using electron-beam and photo-lithography Solid State Commun. 151 1574-8
32. Xia MG, Su ZD and Zhang S L 2012 Raman spectra of bilayer graphene covered with Poly(methyl methacrylate) thin film AIP Adv. 2 032122
33. Kumar K, Kim Y S and Yang EH 2013 The influence of thermal annealing to remove polymeric residue on the electronic doping and morphological characteristics of graphene Carbon 65 35-45
34. Liu ZH, Bol A A and Haensch W 2011 Large-scale graphene transistors with enhanced performance and reliability based on interface engineering by phenylsilane self-assembled monolayers Nano Lett. 11 523-8
35. Shin WC, Kim T Y, Sul O and Cho B J 2012 Seeding atomic layer deposition of high-k dielectric on graphene with ultrathin poly(4-vinylphenol) layer for enhanced device performance and reliability Appl. Phys. Lett. 101 033507
36. Lee JK, Chung HJ, Heo J, Seo S, Cho IH, Kwon HI and Lee JH 2011 Reliability of bottom-gate graphene field-effect transistors prepared by using inductively coupled plasmachemical vapor deposition Appl. Phys. Lett. 98 193504
37. Liu WJ et al 2012 Positive bias-induced V-th instability in graphene field effect transistors IEEE Electron Device Lett. 33 339-41
38. Illarionov Y Y, Smith AD, Vaziri S, Ostling M, Mueller T, Lemme MC and Grasser T 2014 Bias-temperature instability in single-layer graphene field-effect transistors Appl. Phys. Lett. 105 143507