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Volumn 22, Issue 4, 2016, Pages 471-481

Phosphate structure and lithium environments in lithium phosphorus oxynitride amorphous thin films

Author keywords

Glasses; IR spectroscopy; LiPON; Lithium phosphorus oxynitride; Thin film

Indexed keywords

AMORPHOUS FILMS; FILM PREPARATION; GLASS; INFRARED SPECTROSCOPY; IONS; LITHIUM; LITHIUM ALLOYS; MAGNETRON SPUTTERING; NITRIDES; NITROGEN; OXIDE FILMS; PHOSPHORUS; THIN FILM LITHIUM ION BATTERIES; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84961210699     PISSN: 09477047     EISSN: 18620760     Source Type: Journal    
DOI: 10.1007/s11581-015-1573-1     Document Type: Article
Times cited : (36)

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