|
Volumn 249-250, Issue , 2013, Pages 49-55
|
Lithium borophosphate thin film electrolyte as an alternative to LiPON for solder-reflow processed lithium-ion microbatteries
|
Author keywords
Lithium borophosphate electrolyte; Microbattery; Solid electrolyte; Sputtering; Thermal treatment; Thin films; XPS
|
Indexed keywords
ELECTROLYTE THIN FILM;
INDUSTRIAL PROCESSS;
LI-ION MICROBATTERY;
LITHIUM BOROPHOSPHATE ELECTROLYTES;
MICROBATTERY;
MICROELECTRONIC COMPONENTS;
RADIO FREQUENCY SPUTTERING;
THIN FILM ELECTROLYTES;
ACTIVATION ENERGY;
ARGON;
ELECTRIC PROPERTIES;
HEAT TREATMENT;
IONIC CONDUCTIVITY;
MICROELECTRONICS;
PHASE SEPARATION;
PHOTOELECTRONS;
SOLID ELECTROLYTES;
SPUTTERING;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
LITHIUM;
|
EID: 84882781851
PISSN: 01672738
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ssi.2013.07.009 Document Type: Article |
Times cited : (16)
|
References (25)
|