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Volumn 109, Issue 1, 2002, Pages 214-219

Ion-implantation modification of lithium-phosphorus oxynitride thin-films

Author keywords

Ion implantantion; Ionic conductivity; Lipon; Solid elctrolyte

Indexed keywords

CROSSLINKING; ELECTRIC IMPEDANCE; ION IMPLANTATION; IONIC CONDUCTION; LOW TEMPERATURE EFFECTS; NITRIDES; NITROGEN; SOLID ELECTROLYTES; SPUTTERING; SYNTHESIS (CHEMICAL); THIN FILMS;

EID: 0037097498     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0378-7753(02)00036-8     Document Type: Article
Times cited : (33)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.