|
Volumn 109, Issue 1, 2002, Pages 214-219
|
Ion-implantation modification of lithium-phosphorus oxynitride thin-films
|
Author keywords
Ion implantantion; Ionic conductivity; Lipon; Solid elctrolyte
|
Indexed keywords
CROSSLINKING;
ELECTRIC IMPEDANCE;
ION IMPLANTATION;
IONIC CONDUCTION;
LOW TEMPERATURE EFFECTS;
NITRIDES;
NITROGEN;
SOLID ELECTROLYTES;
SPUTTERING;
SYNTHESIS (CHEMICAL);
THIN FILMS;
LIPON ELECTROLYTES;
LITHIUM BATTERIES;
|
EID: 0037097498
PISSN: 03787753
EISSN: None
Source Type: Journal
DOI: 10.1016/S0378-7753(02)00036-8 Document Type: Article |
Times cited : (33)
|
References (17)
|