Characterization of Tungsten Oxide Thin Films Produced by Spark Ablation for NO2 Gas Sensing

ACS Applied Materials and Interfaces

Volumn 8, Issue 6, 2016, Pages 3933-3939

  Isaac, Nishchay A ^a   Valenti, Marco ^a   Schmidt Ott, Andreas ^a   Biskos, George ^a,b,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c CYPRUS INSTITUTE   (Cyprus)

Author keywords

annealing; film morphology; NO2 sensing; spark ablation; tungsten oxide

Indexed keywords

ABLATION; AMORPHOUS FILMS; ANNEALING; GAS DETECTORS; GAS SENSING ELECTRODES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NITROGEN OXIDES; OXIDE FILMS; OXIDES; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SINTERING; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; TUNGSTEN COMPOUNDS; ULTRATHIN FILMS; X RAY DIFFRACTION;

FILM MORPHOLOGY; INERTIAL DEPOSITION; RESULTING MATERIALS; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; SPARK ABLATION; TUNGSTEN OXIDE; TUNGSTEN OXIDE THIN FILMS; X RAY PHOTOEMISSION SPECTROSCOPY;

THIN FILMS;

EID: 84959018247     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b11078     Document Type: Article

References (50)

1. Niklasson, G. A.; Granqvist, C. G. Electrochromics for Smart Windows: Thin Films of Tungsten Oxide and Nickel Oxide, and Devices Based on These J. Mater. Chem. 2007, 17 (2) 127-156 10.1039/B612174H
2. Green, S.; Backholm, J.; Georén, P.; Granqvist, C. G.; Niklasson, G. A. Electrochromism in Nickel Oxide and Tungsten Oxide Thin Films: Ion Intercalation from Different Electrolytes Sol. Energy Mater. Sol. Cells 2009, 93 (12) 2050-2055 10.1016/j.solmat.2009.05.009
3. Wu, M.; Mu, L.; Wang, Y.; Lin, Y.; Guo, H.; Ma, T. One-Step Synthesis of Nano-Scaled Tungsten Oxides and Carbides for Dye-Sensitized Solar Cells as Counter Electrode Catalysts J. Mater. Chem. A 2013, 1 (25) 7519-7524 10.1039/c3ta10628d
4. Di Valentin, C.; Wang, F.; Pacchioni, G. Tungsten Oxide in Catalysis and Photocatalysis: Hints from DFT Top. Catal. 2013, 56 (15-17) 1404-1419 10.1007/s11244-013-0147-6
5. Hoa, N. D.; El-Safty, S. A. Gas Nanosensor Design Packages Based on Tungsten Oxide: Mesocages, Hollow Spheres, and Nanowires Nanotechnology 2011, 22 (48) 485503 10.1088/0957-4484/22/48/485503
6. Kukkola, J.; Mäklin, J.; Halonen, N.; Kyllönen, T.; Tóth, G.; Szabó, M.; Shchukarev, A.; Mikkola, J.-P.; Jantunen, H.; Kordás, K. Gas Sensors Based on Anodic Tungsten Oxide Sens. Actuators, B 2011, 153 (2) 293-300 10.1016/j.snb.2010.10.043
7. Tesfamichael, T.; Ponzoni, A.; Ahsan, M.; Faglia, G. Gas Sensing Characteristics of Fe-Doped Tungsten Oxide Thin Films Sens. Actuators, B 2012, 168 (0) 345-353 10.1016/j.snb.2012.04.032
8. Korotcenkov, G. Metal Oxides for Solid-State Gas Sensors: What Determines Our Choice? Mater. Sci. Eng., B 2007, 139 (1) 1-23 10.1016/j.mseb.2007.01.044
9. Ranjbar, M.; Iraji zad, A.; Mahdavi, S. M. Gasochromic Tungsten Oxide Thin Films for Optical Hydrogen Sensors J. Phys. D: Appl. Phys. 2008, 41 (5) 055405 10.1088/0022-3727/41/5/055405
10. Ganbavle, V. V.; Mohite, S. V.; Agawane, G. L.; Kim, J. H.; Rajpure, K. Y. Nitrogen Dioxide Sensing Properties of Sprayed Tungsten Oxide Thin Film Sensor: Effect of Film Thickness J. Colloid Interface Sci. 2015, 451, 245-254 10.1016/j.jcis.2015.04.001
11. Tomchenko, A. A.; Harmer, G. P.; Marquis, B. T.; Allen, J. W. Semiconducting Metal Oxide Sensor Array for the Selective Detection of Combustion Gases Sens. Actuators, B 2003, 93 (1-3) 126-134 10.1016/S0925-4005(03)00240-5
12. Jimenez-Cadena, G.; Riu, J.; Rius, F. X. Gas Sensors Based on Nanostructured Materials Analyst 2007, 132 (11) 1083-1099 10.1039/b704562j
13. Barsan, N.; Weimar, U. Conduction Model of Metal Oxide Gas Sensors J. Electroceram. 2001, 7 (3) 143-167 10.1023/A:1014405811371
14. Liu, H.; Gong, S. P.; Hu, Y. X.; Liu, J. Q.; Zhou, D. X. Properties and Mechanism Study of SnO2 Nanocrystals for H2S Thick-Film Sensors Sens. Actuators, B 2009, 140 (1) 190-195 10.1016/j.snb.2009.04.027
15. Saadi, L.; Lambert-Mauriat, C.; Oison, V.; Ouali, H.; Hayn, R. Mechanism of NOx Sensing on WO3 Surface: First Principle Calculations Appl. Surf. Sci. 2014, 293 (0) 76-79 10.1016/j.apsusc.2013.12.095
16. Hu, M.; Wang, W.-D.; Zeng, J.; Qin, Y.-X. Density Functional Theory Study of NO 2 -Sensing Mechanisms of Pure and Ti-Doped WO 3 (002) Surfaces Chin. Phys. B 2011, 20 (10) 102101 10.1088/1674-1056/20/10/102101
17. Choi, H. G.; Jung, Y. H.; Kim, D. K. Solvothermal Synthesis of Tungsten Oxide Nanorod/Nanowire/Nanosheet J. Am. Ceram. Soc. 2005, 88 (6) 1684-1686 10.1111/j.1551-2916.2005.00341.x
18. Niederberger, M. Nonaqueous Sol-Gel Routes to Metal Oxide Nanoparticles Acc. Chem. Res. 2007, 40 (9) 793-800 10.1021/ar600035e
19. Gaury, J.; Lafont, U.; Bychkov, E.; Schmidt-Ott, A.; Biskos, G. Connectivity Enhancement of Highly Porous WO3 Nanostructured Thin Films by in Situ Growth of K0.33WO3 Nanowires CrystEngComm 2014, 16 (7) 1228 10.1039/C3CE42078G
20. Gaury, J.; Kelder, E. M.; Bychkov, E.; Biskos, G. Characterization of Nb-Doped WO3 Thin Films Produced by Electrostatic Spray Deposition Thin Solid Films 2013, 534 (0) 32-39 10.1016/j.tsf.2013.01.080
21. Biskos, G.; Vons, V.; Yurteri, C. U.; Schmidt-Ott, A. Generation and Sizing of Particles for Aerosol-Based Nanotechnology KONA 2008, 26, 13-35 10.14356/kona.26.2008006
22. Garwin, E.; Schwyn, S.; S.-O, A. Aerosol Generation by Spark Discharge J. Aerosol Sci. 1988, 19 (5) 639-642
23. Vons, V. A.; Leegwater, H.; Legerstee, W. J.; Eijt, S. W. H.; Schmidt-Ott, A. Hydrogen Storage Properties of Spark Generated Palladium Nanoparticles Int. J. Hydrogen Energy 2010, 35, 5479-5489 10.1016/j.ijhydene.2010.02.118
24. Isaac, N. A.; Ngene, P.; Westerwaal, R. J.; Gaury, J.; Dam, B.; Schmidt-Ott, A.; Biskos, G. Optical Hydrogen Sensing with Nanoparticulate Pd-Au Films Produced by Spark Ablation Sens. Actuators, B 2015, 221 (0) 290-296 10.1016/j.snb.2015.05.095
25. Valenti, M.; Dolat, D.; Biskos, G.; Schmidt-Ott, A.; Smith, W. A. Enhancement of the Photoelectrochemical Performance of CuWO4 Thin Films for Solar Water Splitting by Plasmonic Nanoparticle Functionalization J. Phys. Chem. C 2015, 119 (4) 2096-2104 10.1021/jp506349t
26. Maisser, A.; Barmpounis, K.; Attoui, M. B.; Biskos, G.; Schmidt-Ott, A. Atomic Cluster Generation with an Atmospheric Pressure Spark Discharge Generator Aerosol Sci. Technol. 2015, 49 (10) 886-894 10.1080/02786826.2015.1080812
27. Feng, J.; Biskos, G.; Schmidt-Ott, A. Toward Industrial Scale Synthesis of Ultrapure Singlet Nanoparticles with Controllable Sizes in a Continuous Gas-Phase Process Sci. Rep. 2015, 5, 15788 10.1038/srep15788
28. Pfeiffer, T. V.; Feng, J.; Schmidt-Ott, a. New Developments in Spark Production of Nanoparticles Adv. Powder Technol. 2014, 25 (1) 56-70 10.1016/j.apt.2013.12.005
29. Wang, X.; Kruis, F. E.; McMurry, P. H. Aerodynamic Focusing of Nanoparticles: I. Guidelines for Designing Aerodynamic Lenses for Nanoparticles Aerosol Sci. Technol. 2005, 39 (7) 611-623 10.1080/02786820500181901
30. Fernandez de la Mora, J.; Hering, S. V.; Rao, N.; McMurry, P. H. Hypersonic Impaction of Ultrafine Particles J. Aerosol Sci. 1990, 21 (2) 169-187 10.1016/0021-8502(90)90002-F
31. Wang, S. C.; Flagan, R. C. Scanning Electrical Mobility Spectrometer Aerosol Sci. Technol. 1990, 13 (2) 230-240 10.1080/02786829008959441
32. Knutson, E. O.; Whitby, K.T. Aerosol Classification by Electric Mobility: Apparatus, Theory, and Applications J. Aerosol Sci. 1975, 6 (1957) 443-451 10.1016/0021-8502(75)90060-9
33. Agarwal, J. K.; Sem, G. J. Continuous Flow, Single-Particle-Counting Condensation Nucleus Counter J. Aerosol Sci. 1980, 11 (4) 343-357 10.1016/0021-8502(80)90042-7
34. Evans, A. G.; Hutchinson, J. W. The Thermomechanical Integrity of Thin Films and Multilayers Acta Metall. Mater. 1995, 43 (7) 2507-2530 10.1016/0956-7151(94)00444-M
35. Doerner, M. F.; Nix, W. D. Stresses and Deformation Processes in Thin Films on Substrates Crit. Rev. Solid State Mater. Sci. 1988, 14 (3) 225-268 10.1080/10408438808243734
36. Hoffman, R. W. Stresses in Thin Films: The Relevance of Grain Boundaries and Impurities Thin Solid Films 1976, 34 (2) 185-190 10.1016/0040-6090(76)90453-3
37. Freund, L. B.; Chason, E. Model for Stress Generated upon Contact of Neighboring Islands on the Surface of a Substrate J. Appl. Phys. 2001, 89 (9) 4866 10.1063/1.1359437
38. Daniel, M.; Friedemann, M.; Jöhrmann, N.; Liebig, A.; Donges, J.; Hietschold, M.; Beddies, G.; Albrecht, M. Influence of the Substrate Thermal Expansion Coefficient on the Morphology and Elastic Stress of CoSb3 Thin Films Phys. Status Solidi A 2013, 210 (1) 140-146 10.1002/pssa.201228388
39. Fang, W.; Wickert, J. A. Determining Mean and Gradient Residual Stresses in Thin Films Using Micromachined Cantilevers J. Micromech. Microeng. 1996, 6 (3) 301 10.1088/0960-1317/6/3/002
40. Chen, H.; Yu, Y.; Xin, H. L.; Newton, K. A.; Holtz, M. E.; Wang, D.; Muller, D. A.; Abruña, H. D.; DiSalvo, F. J. Coalescence in the Thermal Annealing of Nanoparticles: An in Situ STEM Study of the Growth Mechanisms of Ordered Pt-Fe Nanoparticles in a KCl Matrix Chem. Mater. 2013, 25 (8) 1436-1442 10.1021/cm303489z
41. Yang, T.-Y.; Wu, C.-Y.; Tsai, M.-H.; Lin, H.-M.; Tsai, W.-L.; Hwu, Y. Thermal Effects on the Structural Properties of Tungsten Oxide Nanoparticles J. Nanopart. Res. 2004, 6 (2) 171-179 10.1023/B:NANO.0000034632.46407.0a
42. Gogova, D.; Gesheva, K.; Szekeres, A.; Sendova-vassileva, M. Structural and Optical Properties of CVD Thin Tungsten Oxide Films Phys. Status Solidi 1999, 176, 969 10.1002/(SICI)1521-396X(199912)176:2<969::AID-PSSA969>3.0.CO;2-9
43. LeGore, L. J.; Lad, R. J.; Moulzolf, S. C.; Vetelino, J. F.; Frederick, B. G.; Kenik, E. a. Defects and Morphology of Tungsten Trioxide Thin Films Thin Solid Films 2002, 406 (1-2) 79-86 10.1016/S0040-6090(02)00047-0
44. Hembram, K. P. S. S.; Thomas, R.; Rao, G. M. Microstructural Evolution of Tungsten Oxide Thin Films Appl. Surf. Sci. 2009, 256, 419-422 10.1016/j.apsusc.2009.06.016
45. Gehlig, R.; Salje, E.; Carley, A. F.; Roberts, M. W. XPS Studies on WO2.90 and WO2.72 and the Influence of Metallic Impurities J. Solid State Chem. 1983, 49 (3) 318-324 10.1016/S0022-4596(83)80009-7
46. Katrib, A.; Hemming, F.; Wehrer, P.; Hilaire, L.; Maire, G. The Multi-Surface Structure and Catalytic Properties of Partially Reduced WO3, WO2 and WC + O2 or W + O2 as Characterized by XPS J. Electron Spectrosc. Relat. Phenom. 1995, 76 (0) 195-200 10.1016/0368-2048(95)02451-4
47. Xie, F. Y.; Gong, L.; Liu, X.; Tao, Y. T.; Zhang, W. H.; Chen, S. H.; Meng, H.; Chen, J. XPS Studies on Surface Reduction of Tungsten Oxide Nanowire Film by Ar+ Bombardment J. Electron Spectrosc. Relat. Phenom. 2012, 185 (3-4) 112-118 10.1016/j.elspec.2012.01.004
48. Zeng, J.; Hu, M.; Wang, W.; Chen, H.; Qin, Y. NO2-Sensing Properties of Porous WO3 Gas Sensor Based on Anodized Sputtered Tungsten Thin Film Sens. Actuators, B 2012, 161 (1) 447-452 10.1016/j.snb.2011.10.059
49. Epifani, M.; Prades, J. D.; Comini, E.; Pellicer, E.; Avella, M.; Siciliano, P.; Faglia, G.; Cirera, A.; Scotti, R.; Morazzoni, F.; Morante, J. R. The Role of Surface Oxygen Vacancies in the NO2 Sensing Properties of SnO2 Nanocrystals J. Phys. Chem. C 2008, 112 (49) 19540-19546 10.1021/jp804916g
50. Ruhland, B.; Becker, T.; Müller, G. Gas-Kinetic Interactions of Nitrous Oxides with SnO2 Surfaces Sens. Actuators, B 1998, 50 (1) 85-94 10.1016/S0925-4005(98)00160-9