Graphene Squeeze-Film Pressure Sensors

Nano Letters

Volumn 16, Issue 1, 2016, Pages 568-571

  Dolleman, Robin J ^a   Davidovikj, Dejan ^a   Cartamil Bueno, Santiago J ^a   Van Der Zant, Herre S J ^a   Steeneken, Peter G ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Graphene; MEMS; nanoelectromechanical systems (NEMS); pressure sensor; squeeze film effect

Indexed keywords

GRAPHENE; MEMS; NATURAL FREQUENCIES; PRESSURE SENSORS;

FEW-LAYER GRAPHENE; FLEXIBLE MEMBRANES; NANO ELECTROMECHANICAL SYSTEMS; OPERATING PRINCIPLES; PRESSURE DEPENDENCE; RESONANCE FREQUENCIES; SQUEEZE FILM EFFECTS; STATE OF THE ART;

MEMBRANES;

EID: 84957998699     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/acs.nanolett.5b04251     Document Type: Article

References (17)

1. Novoselov, K.; Geim, A. K.; Morozov, S.; Jiang, D.; Katsnelson, M.; Grigorieva, I.; Dubonos, S.; Firsov, A. Nature 2005, 438, 197-200 10.1038/nature04233
2. Lee, C.; Wei, X.; Kysar, J. W.; Hone, J. Science 2008, 321, 385-388 10.1126/science.1157996
3. Lee, G.-H.; Cooper, R. C.; An, S. J.; Lee, S.; van der Zande, A.; Petrone, N.; Hammerberg, A. G.; Lee, C.; Crawford, B.; Oliver, W. Science 2013, 340, 1073-1076 10.1126/science.1235126
4. Bunch, J. S.; Verbridge, S. S.; Alden, J. S.; van der Zande, A. M.; Parpia, J. M.; Craighead, H. G.; McEuen, P. L. Nano Lett. 2008, 8, 2458-2462 10.1021/nl801457b
5. Smith, A.; Niklaus, F.; Paussa, A.; Vaziri, S.; Fischer, A. C.; Sterner, M.; Forsberg, F.; Delin, A.; Esseni, D.; Palestri, P. Nano Lett. 2013, 13, 3237-3242 10.1021/nl401352k
6. 2 resonators for pressure sensing, Frequency Control Symposium (FCS); IEEE International, 2014; pp 1-4.
7. Lee, J.; Wang, Z.; He, K.; Shan, J.; Feng, P. X.-L. Appl. Phys. Lett. 2014, 105, 023104 10.1063/1.4890387
8. Bao, M.; Yang, H. Sens. Actuators, A 2007, 136, 3-27 10.1016/j.sna.2007.01.008
9. Andrews, M.; Turner, G.; Harris, P.; Harris, I. Sens. Actuators, A 1993, 36, 219-226 10.1016/0924-4247(93)80196-N
10. Southworth, D.; Craighead, H.; Parpia, J. Appl. Phys. Lett. 2009, 94, 213506 10.1063/1.3141731
11. Andrews, M.; Harris, I.; Turner, G. Sens. Actuators, A 1993, 36, 79-87 10.1016/0924-4247(93)80144-6
12. Kumar, L.; Reimann, K.; Goossens, M. J.; Besling, W. F.; Dolleman, R. J.; Pijnenburg, R. H.; van der Avoort, C.; Sarro, L. P.; Steeneken, P. G. J. Micromech. Microeng. 2015, 25, 045011 10.1088/0960-1317/25/4/045011
13. Castellanos-Gomez, A.; Buscema, M.; Molenaar, R.; Singh, V.; Janssen, L.; van der Zant, H. S.; Steele, G. A. 2D Mater. 2014, 1, 011002 10.1088/2053-1583/1/1/011002
14. Castellanos-Gomez, A.; Wojtaszek, M.; Tombros, N.; Agraït, N.; van Wees, B. J.; Rubio-Bollinger, G. Small 2011, 7, 2491-2497
15. Castellanos-Gomez, A.; van Leeuwen, R.; Buscema, M.; van der Zant, H. S.; Steele, G. A.; Venstra, W. J. Adv. Mater. 2013, 25, 6719-6723 10.1002/adma.201303569
16. Cartamil-Bueno, S. J.; Steeneken, P. G.; Tichelaar, F. D.; Navarro-Moratalla, E.; Venstra, W. J.; van Leeuwen, R.; Coronado, E.; van der Zant, H. S.; Steele, G. A.; Castellanos-Gomez, A. Nano Res. 2015, 8, 2842-2849 10.1007/s12274-015-0789-8
17. Bao, M.; Yang, H.; Yin, H.; Sun, Y. J. Micromech. Microeng. 2002, 12, 341 10.1088/0960-1317/12/3/322