Monolithic Multichannel Ultraviolet Photodiodes Based on (Mg,Zn)O Thin Films With Continuous Composition Spreads

IEEE Journal of Selected Topics in Quantum Electronics

Volumn 20, Issue 6, 2014, Pages 106-111

  Zhang, Zhipeng ^a   Von Wenckstern, Holger ^a   Grundmann, Marius ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Continuous composition spread (CCS); magnesium zinc oxide (Mg,Zn)O; MSM structure; narrow bandwidth; ultraviolet photodetectors; wavelength selectivity

Indexed keywords

BANDWIDTH; II-VI SEMICONDUCTORS; MAGNESIUM COMPOUNDS; PHOTODIODES; PULSED LASER DEPOSITION; ZINC OXIDE; ZINC SULFIDE;

CONTINUOUS COMPOSITION SPREADS; MAGNESIUM ZINC OXIDES; MSM STRUCTURES; NARROW BANDWIDTH; ULTRA-VIOLET PHOTODETECTORS; WAVELENGTH SELECTIVITY;

THIN FILMS;

EID: 84957900708     PISSN: 1077260X     EISSN: 15584542     Source Type: Journal    
DOI: 10.1109/JSTQE.2014.2319457     Document Type: Article

References (30)

1. M. Razeghi and A. Rogalski, "Semiconductor ultraviolet detectors," J. Appl. Phys., vol. 79, no. 10, pp. 7433-7473, 1996.
2. S. J. Pearton, F. Ren, Y.-L. Wang, B. H. Chu, K. H. Chen, C. Y. Chang, W. Lim, J. Lin, and D. P. Norton, "Recent advances in wide bandgap semiconductor biological and gas sensors," Prog. Mater. Sci., vol. 55, no. 1, pp. 1-59, 2010.
3. U. Karrer, A. Dobner, O. Amabacher, and M. Stutzmann, "AlGaN-based ultraviolet light detectors with integrated optical filters," J. Vac. Sci. Technol. B, vol. 18, no. 2, pp. 757-760, 2000.
4. S. K. Zhang, W. B. Wang, F. Yun, L. He, H. Morkoç, X. Zhou, M. Tamargo, and R. R. Alfano, "Backilluminated ultraviolet photodetector based on GaN/AlGaN multiple quantum wells," Appl. Phys. Lett., vol. 81, no. 24, pp. 4628-4630, 2002.
5. S. K. Zhang, W. B. Wang, I. Shtau, F. Yun, L. He, H. Morkoç, X. Zhou, M. Tamargo, and R. R. Alfano, "Backilluminated GaN/AlGaN heterojunction ultraviolet photodetector with high internal gain," Appl. Phys. Lett., vol. 81, no. 25, pp. 4862-4864, 2002.
6. O. Katz, G. Bahir, and J. Salzman, "Persistent photocurrent and surface trapping in GaN Schottky ultraviolet detectors," Appl. Phys. Lett., vol. 84, no. 20, pp. 4092-4094, 2004.
7. M. Gökkavas, S. Butun, H. Yu, T. Tut, B. Butun, and E. Ozbay, "Dual-color ultraviolet metal-semiconductor-metal AlGaN photodetectors," Appl. Phys. Lett., vol. 89, no. 14, pp. 143503-1-143503-3, 2006.
8. Z. P. Zhang, H. von Wenckstern, M. Schmidt, and M. Grundmann, "Wavelength selective metal-semiconductor-metal photodetectors based on (Mg,Zn)O-heterostructures," Appl. Phys. Lett., vol. 99, no. 8, pp. 083502-1-083502-3, 2011.
9. 0.54O thin film," IEEE Electron. Device Lett., vol. 33, no. 7, pp. 1033-1035, Jul. 2012.
10. C. Li, Z. Zhang, H. Chen, X. Xie, and D. Shen, "Vertical MgZnO Schottky ultraviolet photodetector with Al doped MgZnO transparent electrode," Thin Solid Films, vol. 548, pp. 456-459, 2013.
11. 1-x O-based visible-blind ultraviolet photodetectors with active anti-reflection layer," Appl. Phys. Lett., vol. 102, no. 23, pp. 231122-1-231122-4, 2013.
12. Z. P. Zhang, H. von Wenckstern, and M. Grundmann, "Energy-selective multichannel ultraviolet photodiodes based on (Mg,Zn)O," Appl. Phys. Lett., vol. 103, no. 17, pp. 171111-1-171111-4, 2013.
13. H. von Wenckstern, R. Schmidt-Grund, C. Bundesmann, A. Müller, C. P. Dietrich, M. Stözel, M. Lange, and M. Grundmann, "The (Mg,Zn)O alloy," in Handbook of Zinc Oxide and Related Materials, ed. Z. C. Feng, Boca Raton, FL, USA: CRC Press, 2012, ch. 10, p. 257.
14. F. Schmidt, H. von Wenckstern, D. Spemann, and M. Grundmann, "On the radiation hardness of (Mg,Zn)O thin films grown by pulsed-laser deposition," Appl. Phys. Lett., vol. 101, no. 1, pp. 012103-1-012103-3, 2012.
15. Ü. Özgür, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doğan, V. Avrutin, S.-J. Cho, and H. Morkoç, "A comprehensive review of ZnO materials and devices," J. Appl. Phys., vol. 98, no. 4, pp. 041301-1-041301-103, 2005.
16. M. Lorenz, H. Hochmuth, C. Grüner, H. Hilmer, A. Lajn, D. Spemann, M. Brandt, J. Zippel, R. Schmidt-Grund, H. von Wenckstern, and M. Grundmann, "Oxide thin film heterostructures on large area, with flexible doping, low dislocation density, and abrupt interfaces: Grown by pulsed laser deposition," Laser Chem., vol. 2010, pp. 140976-1-140976-27, 2010.
17. J. J. Hanak, "The multiple-sample concept in materials research: Synthesis, compositional analysis and testing of entire multicomponent systems," J. Mater. Sci., vol. 5, no. 11, pp. 964-971, 1970.
18. 1-xO composition spreads," J. Appl. Phys., vol. 94, no. 11, pp. 7336-7340, 2003.
19. H. von Wenckstern, Z. P. Zhang, and M. Grundmann, "Continuous composition spread using pulsed-laser deposition with a single segmented target," Cryst. Eng. Commun., vol. 15, pp. 10020-10027, 2013.
20. H. von Wenckstern, Z. P. Zhang, J. Lenzner, F. Schmidt, and M. Grundmann, "A continuous composition spread approach towards monolithic, wavelength-selective multichannel UV-photo-detector arrays," in Mater. Res. Soc. Proc., vol. 1633, pp. r15-05, 2014.
21. 1-x as a II-VI widegap semiconductor alloy," Appl. Phys. Lett., vol. 72, no. 19, pp. 2466-2468, 1998.
22. 1-x/ZnO heterointerfaces," Appl. Phys. Lett., vol. 75, no. 26, pp. 4088-4090, 1999.
23. S. M. Sze, D. J. Coleman Jr, and A. Loya, "Current transport in metal-semiconductor-metal (MSM) structures," Solid-State Electron., vol. 14, no. 12, pp. 1209-1218, 1971.
24. A. Lajn, H. von Wenckstern, Z. Zhang, C. Czekalla, G. Biehne, J. Lenzner, H. Hochmuth, M. Lorenz, M. Grundmann, S. Wickert, C. Vogt, and R. Denecke, "Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on n-type ZnO," J. Vac. Sci. Technol. B, vol. 27, no. 3, pp. 1769-1773, 2009.
25. Space Environment (Natural and Artificial) - Process for Determining Solar Irradiances, 1st ed., International Standard ISO 21348, 2007.
26. M. Grundmann, The Physics of Semiconductors, 2nd ed. Berlin, Heidelberg: Springer-Verlag, 2010.
27. M. Grundmann, and D. P. Dietrich, "Lineshape theory of photoluminescence from semiconductor alloys," J. Appl. Phys., vol. 106, no. 12, pp. 123521-1-123521-10, 2009.
28. 3 thin films via growth temperature and pressure," Phys. Stat. Sol. (A), vol. 211, no. 1, pp. 34-39, 2014.
29. 3 thin films grown by pulsed laser deposition," Phys. Stat. Sol. (A), vol. 211, no. 1, pp. 40-47, 2014.
30. 3," Phys. Stat. Sol. RRL, 2014. DOI: 10.1002/pssr.201409004.