Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on n -type ZnO

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1769-1773

  Lajn, A ^a   Wenckstern, H V ^a   Zhang, Z ^a   Czekalla, C ^a   Biehne, G ^a   Lenzner, J ^a   Hochmuth, H ^a   Lorenz, M ^a   Grundmann, M ^a   Wickert, S ^a   Vogt, C ^a   Denecke, R ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISTILLATION; EPITAXIAL GROWTH; GOLD; GOLD COATINGS; PLATINUM; PULSED LASER DEPOSITION; VOLTAGE MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

BARRIER HEIGHTS; CAPACITANCE VOLTAGE; CONTACT MATERIAL; CURRENT-VOLTAGE MEASUREMENTS; GOLD CONTACTS; HETEROEPITAXIAL; IDEALITY FACTORS; LATERAL FLUCTUATIONS; PHOTOCURRENT MEASUREMENT; SCHOTTKY CONTACTS; STANDARD DEVIATION; TEMPERATURE DEPENDENT; ZNO;

SILVER;

EID: 70350081241     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3086718     Document Type: Conference Paper

References (15)

1. J. F. Wager, Science 0036-8075 10.1126/science.1085276 300, 1245 (2003).
2. H. Frenzel, A. Lajn, M. Brandt, H. von Wenckstern, G. Biehne, H. Hochmuth, M. Lorenz, and M. Grundmann, Appl. Phys. Lett. 0003-6951 10.1063/1.2926684 92, 192108 (2008).
3. R. Schifano, E. V. Monakhov, U. Grossner, and B. G. Svensson, Appl. Phys. Lett. 0003-6951 10.1063/1.2806194 91, 193507 (2007).
4. S. -H. Kim, H. -K. Kim, and T. -Y. Seonga, Appl. Phys. Lett. 0003-6951 10.1063/1.1862772 86, 112101 (2005).
5. A. Y. Polyakov, N. B. Smirnov, E. A. Kozhukhova, V. I. Vdovin, K. Ip, Y. W. Heo, D. P. Norton, and S. J. Pearton, Appl. Phys. Lett. 0003-6951 10.1063/1.1604173 83, 1575 (2003).
6. B. J. Coppa, R. F. Davis, and R. J. Nemanich, Appl. Phys. Lett. 0003-6951 10.1063/1.1536264 82, 400 (2003).
7. M. W. Allen, S. M. Durbin, and J. B. Metson, Appl. Phys. Lett. 0003-6951 10.1063/1.2768028 91, 053512 (2007).
8. H. von Wenckstern, G. Biehne, R. A. Rahman, H. Hochmuth, M. Lorenz, and M. Grundmann, Appl. Phys. Lett. 0003-6951 10.1063/1.2180445 88, 092102 (2006).
9. B. J. Coppa, C. C. Fulton, S. M. Kiesel, R. F. Davis, C. Pandarinath, J. E. Burnette, R. J. Nemanich, and D. J. Smith, J. Appl. Phys. 0021-8979 10.1063/1.1898436 97, 103517 (2005).
10. M. P. Seah, Surf. Interface Anal. 0142-2421 10.1002/sia.1076.abs 31, 721 (2001).
11. T. L. Barr, J. Phys. Chem. 0022-3654 10.1021/j100505a006 82, 1801 (1978).
12. T. Pillo, R. Zimmermann, P. Steiner, and S. Hufner, J. Phys.: Condens. Matter 0953-8984 10.1088/0953-8984/9/19/018 9, 3987 (1997).
13. G. B. Hoflund, Z. F. Hazos, and G. N. Salaita, Phys. Rev. B 0163-1829 10.1103/PhysRevB.62.11126 62, 11126 (2000).
14. J. H. Werner and H. H. Güttler, J. Appl. Phys. 0021-8979 10.1063/1.347243 69, 1522 (1991).
15. R. C. Neville and C. A. Mead, J. Appl. Phys. 0021-8979 10.1063/1.1659509 41, 3795 (1970).