Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition

Journal of Physical Chemistry C

Volumn 120, Issue 1, 2016, Pages 750-755

  Bosch, Roger H E C ^a   Bloksma, Frank L ^a   Huijs, Jochem M M ^a   Verheijen, Marcel A ^a,b   Kessels, Wilhelmus M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INFRARED SPECTROSCOPY; METAL NANOPARTICLES; NANOPARTICLES; PLATINUM; SPECTROSCOPIC ELLIPSOMETRY; SURFACE CHEMISTRY; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

CARBONACEOUS LAYERS; DIFFERENT STAGES; FREE CARRIER ABSORPTION; LOW TEMPERATURE GROWTH; PT NANOPARTICLES; REACTION MECHANISM; SITU INFRARED SPECTROSCOPY; SURFACE INFRARED SPECTROSCOPY;

ATOMIC LAYER DEPOSITION;

EID: 84954510940     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/acs.jpcc.5b10839     Document Type: Article

References (27)

1. Puurunen, R. L. Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/Water Process J. Appl. Phys. 2005, 97, 121301 10.1063/1.1940727
2. George, S. M. Atomic Layer Deposition: An Overview Chem. Rev. 2010, 110, 111-131 10.1021/cr900056b
3. Hämäläinen, J.; Ritala, M.; Leskelä, M. Atomic Layer Deposition of Noble Metals and Their Oxides Chem. Mater. 2014, 26, 786-801 10.1021/cm402221y
4. Erkens, I. J. M.; Mackus, A. J. M.; Knoops, H. C. M.; Smits, P.; van de Ven, T. H. M.; Roozeboom, F.; Kessels, W. M. M. Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition ECS J. Solid State Sci. Technol. 2012, 1, P255-P262 10.1149/2.006206jss
5. Kessels, W. M. M.; Knoops, H. C. M.; Dielissen, S. A. F.; Mackus, A. J. M.; van de Sanden, M. C. M. Surface Reactions During Atomic Layer Deposition of Pt Derived From Gas Phase Infrared Spectroscopy Appl. Phys. Lett. 2009, 95, 013114 10.1063/1.3176946
6. Geyer, S. M.; Methaapanon, R.; Shong, B.; Pianetta, P. A.; Bent, S. F. In Vacuo Photoemission Studies of Platinum Atomic Layer Deposition Using Synchrotron Radiation J. Phys. Chem. Lett. 2013, 4, 176-179 10.1021/jz301475z
7. Mackus, A. J. M.; Verheijen, M. A.; Leick, N.; Bol, A. A.; Kessels, W. M. M. Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis Chem. Mater. 2013, 25, 1905-1911 10.1021/cm400562u
8. Aaltonen, T.; Ritala, M.; Tung, Y.-L.; Chi, Y.; Arstila, K.; Meinander, K.; Leskelä, M. Atomic Layer Deposition of Noble Metals: Exploration of the Low Limit of the Deposition Temperature J. Mater. Res. 2004, 19, 3353-3358 10.1557/JMR.2004.0426
9. Dendooven, J.; Ramachandran, R. K.; Devloo-Casier, K.; Rampelberg, G.; Filez, M.; Poelman, H.; Marin, G. B.; Fonda, E.; Detavernier, C. Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone J. Phys. Chem. C 2013, 117, 20557-20561 10.1021/jp403455a
10. Knoops, H. C. M.; Mackus, A. J. M.; Donders, M. E.; van de Sanden, M. C. M.; Notten, P. H. L.; Kessels, W. M. M. Remote Plasma ALD of Platinum and Platinum Oxide Films Electrochem. Solid-State Lett. 2009, 12, G34 10.1149/1.3125876
11. 2 Plasma Chem. Vap. Deposition 2014, 20, 258-268 10.1002/cvde.201407109
12. Mackus, A. J. M.; Garcia-Alonso, D.; Knoops, H. C. M.; Bol, A. A.; Kessels, W. M. M. Room-Temperature Atomic Layer Deposition of Platinum Chem. Mater. 2013, 25, 1769-1774 10.1021/cm400274n
13. Garcia-Alonso, D.; Zardetto, V.; Mackus, A. J. M.; De Rossi, F.; Verheijen, M. A.; Brown, T. M.; Kessels, W. M. M.; Creatore, M. Atomic Layer Deposition of Highly Transparent Platinum Counter Electrodes for Metal/Polymer Flexible Dye-Sensitized Solar Cells. Adv. Energy Mater. 2014, 4.
14. 2 Nano Res. 2012, 5, 513-520 10.1007/s12274-012-0236-z
15. Mackus, A. J. M.; Weber, M. J.; Thissen, N. F. W.; Garcia-Alonso, D.; Vervuurt, R. H. J.; Assali, S.; Bol, A. A.; Verheijen, M. A.; Kessels, W. M. M. Atomic Layer Deposition of Pd and Pt Nanoparticles for Catalysis: On the Mechanisms of Nanoparticle Formation Nanotechnology 2016, 27, 034001 10.1088/0957-4484/27/3/034001
16. Weaver, J. Optical Properties of Rh, Pd, Ir, and Pt Phys. Rev. B 1975, 11, 1416-1425 10.1103/PhysRevB.11.1416
17. 2: Contributions from Bound Charges Phys. Rev. B: Condens. Matter Mater. Phys. 2006, 74, 205117 10.1103/PhysRevB.74.205117
18. Gilarowski, G.; Erley, W.; Ibach, H. Photochemical Reactions of Water Adsorbed on Pt(111) Surf. Sci. 1996, 351, 156-164 10.1016/0039-6028(95)01360-1
19. Fisher, G.; Sexton, B. Identification of an Adsorbed Hydroxyl Species on the Pt(111) Surface Phys. Rev. Lett. 1980, 44, 683-686 10.1103/PhysRevLett.44.683
20. Daniel, D. W. Infrared Studies of Carbon Monoxide and Carbon Dioxide Adsorption on Platinum/Ceria: The Characterization of Active Sites J. Phys. Chem. 1988, 92, 3891-3899 10.1021/j100324a042
21. Primet, M. Electronic Transfer and Ligand Effects in the Infrared Spectra of Adsorbed Carbon Monoxide J. Catal. 1984, 88, 273-282 10.1016/0021-9517(84)90003-4
22. Engel, T.; Ertl, G. A Molecular Beam Investigation of the Catalytic Oxidation of CO on Pd(111) J. Chem. Phys. 1978, 69, 1267 10.1063/1.436666
23. Ehsasi, M.; Matloch, M.; Frank, O.; Block, J. H.; Christmann, K.; Rys, F. S.; Hirschwald, W. Steady and Nonsteady Rates of Reaction in a Heterogeneously Catalyzed Reaction: Oxidation of CO on Platinum, Experiments and Simulations J. Chem. Phys. 1989, 91, 4949 10.1063/1.456736
24. Ertl, G.; Neumann, M.; Streit, K. Chemisorption of CO on the Pt(111) Surface Surf. Sci. 1977, 64, 393-410 10.1016/0039-6028(77)90052-8
25. Gland, J. L.; Sexton, B. A.; Fisher, G. B. Oxygen Interactions with the Pt(111) Surface Surf. Sci. 1980, 95, 587-602 10.1016/0039-6028(80)90197-1
26. Saliba, N. A.; Tsai, Y.-L.; Panja, C.; Koel, B. E. Oxidation of Pt(111) by Ozone (O3) under UHV Conditions Surf. Sci. 1999, 419, 79-88 10.1016/S0039-6028(98)00667-0
27. Lukaszewski, M.; Siwek, H.; Czerwinski, A. Electrosorption of Carbon Dioxide on Platinum Group Metals and Alloys-a Review J. Solid State Electrochem. 2009, 13, 813-827 10.1007/s10008-008-0618-z