Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 34, Issue 1, 2016, Pages

  Lemaire, Paul C ^a   Oldham, Christopher J ^a   Parsons, Gregory N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC LAYER DEPOSITION; CHEMICAL BONDS; COLOR; COLORIMETRY; DEPOSITION; ETHYLENE; ETHYLENE GLYCOL; FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; METAL HALIDES; METALS; OPTICAL PROPERTIES; ORGANOMETALLICS; SELF ASSEMBLY; SWELLING; TRIETHANOLAMINE; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL SEPARATION; FOURIER TRANSFORM INFRARED; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); QUATERNARY AMMONIUM SALT; TERTIARY AMINE GROUPS; TITANIUM TETRACHLORIDES; VISIBLE COLOR CHANGES;

ETHANOLAMINES;

EID: 84950139017     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4937222     Document Type: Article

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