Molecular layer deposition of amine-containing alucone thin films

Surface and Coatings Technology

Volumn 230, Issue , 2013, Pages 101-105

  Bahlawane, Naoufal ^a   Arl, Didier ^a   Thomann, Jean Sébastien ^a   Adjeroud, Noureddine ^a   Menguelti, Kevin ^a   Lenoble, Damien ^a  

^a LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY   (Luxembourg)

Author keywords

ALD; Alucone; Functional coatings; Hybrid coatings; MLD

Indexed keywords

ALD; ALUCONE; FUNCTIONAL COATING; HYBRID COATING; MLD;

ACETONE; ATOMIC LAYER DEPOSITION; CHEMICAL ANALYSIS; MASS SPECTROMETRY; PROTECTIVE COATINGS; THIN FILMS;

DEPOSITION;

EID: 84881314055     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.06.098     Document Type: Article

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