메뉴 건너뛰기




Volumn 6, Issue , 2015, Pages

Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM OXIDE; COPOLYMER; CRYSTALLIN; METAL NANOPARTICLE; NANOCOATING; SILICON; SILICON NANOTEXTURE; UNCLASSIFIED DRUG;

EID: 84941902322     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms6963     Document Type: Article
Times cited : (263)

References (33)
  • 1
    • 78650717114 scopus 로고    scopus 로고
    • Anti-reflecting and photonic nanostructures
    • Chattopadhyay, S. et al. Anti-reflecting and photonic nanostructures. Mater. Sci. Eng. R 69, 1-35 (2010).
    • (2010) Mater. Sci. Eng. R , vol.69 , pp. 1-35
    • Chattopadhyay, S.1
  • 2
    • 84864717148 scopus 로고    scopus 로고
    • Nanotextured silica surfaces with robust superhydrophobicity and omnidirectional broadband supertransmissivity
    • Park, K.-C. et al. Nanotextured silica surfaces with robust superhydrophobicity and omnidirectional broadband supertransmissivity. ACS Nano 6, 3789-3799 (2012).
    • (2012) ACS Nano , vol.6 , pp. 3789-3799
    • Park, K.-C.1
  • 3
    • 0033170289 scopus 로고    scopus 로고
    • Subwavelength-structured antireflective surfaces on glass
    • Gombert, A. et al. Subwavelength-structured antireflective surfaces on glass. Thin Solid Films 351, 73-78 (1999).
    • (1999) Thin Solid Films , vol.351 , pp. 73-78
    • Gombert, A.1
  • 4
    • 34248332216 scopus 로고    scopus 로고
    • Optical thin-film materials with low refractive index for broadband elimination of fresnel reflection
    • Xi, J.-Q. et al. Optical thin-film materials with low refractive index for broadband elimination of fresnel reflection. Nat. Photon. 1, 176-179 (2007).
    • (2007) Nat. Photon. , vol.1 , pp. 176-179
    • Xi, J.-Q.1
  • 5
    • 79952935669 scopus 로고    scopus 로고
    • Nanofabrication of broad-band antireflective surfaces using self-assembly of block copolymers
    • Paivanranta, B. et al. Nanofabrication of broad-band antireflective surfaces using self-assembly of block copolymers. ACS Nano 5, 1860-1864 (2011).
    • (2011) ACS Nano , vol.5 , pp. 1860-1864
    • Paivanranta, B.1
  • 6
    • 84886255050 scopus 로고    scopus 로고
    • Reconfigurable infrared camouflage coatings from a cephalopod protein
    • Phan, L. et al. Reconfigurable infrared camouflage coatings from a cephalopod protein. Adv. Mater. 25, 5621-5625 (2013).
    • (2013) Adv. Mater. , vol.25 , pp. 5621-5625
    • Phan, L.1
  • 7
    • 77953318040 scopus 로고    scopus 로고
    • Nanodome solar cells with efficient light management and self-cleaning
    • Zhu, J., Hsu, C.-M., Yu, Z., Fan, S. & Cui, Y. Nanodome solar cells with efficient light management and self-cleaning. Nano Lett. 10, 1979-1984 (2009).
    • (2009) Nano Lett. , vol.10 , pp. 1979-1984
    • Zhu, J.1    Hsu, C.-M.2    Yu, Z.3    Fan, S.4    Cui, Y.5
  • 8
    • 84897858797 scopus 로고    scopus 로고
    • Towards high-efficiency multi-junction solar cells with biologically inspired nanosurfaces
    • Yu, P. et al. Towards high-efficiency multi-junction solar cells with biologically inspired nanosurfaces. Prog. Photovolt. Res. Appl. 22, 300-307 (2012).
    • (2012) Prog. Photovolt. Res. Appl. , vol.22 , pp. 300-307
    • Yu, P.1
  • 9
    • 84858165658 scopus 로고    scopus 로고
    • Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings
    • Wang, K. X., Yu, Z., Liu, V., Cui, Y. & Fan, S. Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings. Nano Lett. 12, 1616-1619 (2012).
    • (2012) Nano Lett. , vol.12 , pp. 1616-1619
    • Wang, K.X.1    Yu, Z.2    Liu, V.3    Cui, Y.4    Fan, S.5
  • 10
    • 33646877101 scopus 로고    scopus 로고
    • Black nonreflecting silicon surfaces for solar cells
    • Koynov, S., Brandt, M. S. & Stutzmann, M. Black nonreflecting silicon surfaces for solar cells. Appl. Phys. Lett. 88, 203107-203109 (2006).
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 203107-203109
    • Koynov, S.1    Brandt, M.S.2    Stutzmann, M.3
  • 11
    • 67649111365 scopus 로고    scopus 로고
    • Nanostructured black silicon and the optical reflectance of graded-density surfaces
    • Branz, H. M. et al. Nanostructured black silicon and the optical reflectance of graded-density surfaces. Appl. Phys. Lett. 94, 231121-231123 (2009).
    • (2009) Appl. Phys. Lett. , vol.94 , pp. 231121-231123
    • Branz, H.M.1
  • 12
    • 36849015423 scopus 로고    scopus 로고
    • Improved broadband and quasi-omnidirectional antireflection properties with biomimetic silicon nanostructures
    • Huang, Y.-F. et al. Improved broadband and quasi-omnidirectional antireflection properties with biomimetic silicon nanostructures. Nat. Nano 2, 770-774 (2007).
    • (2007) Nat. Nano , vol.2 , pp. 770-774
    • Huang, Y.-F.1
  • 13
    • 84869094983 scopus 로고    scopus 로고
    • An 18. 2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures
    • Oh, J., Yuan, H.-C. & Branz, H. M. An 18. 2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures. Nat. Nano 7, 743-748 (2012).
    • (2012) Nat. Nano , vol.7 , pp. 743-748
    • Oh, J.1    Yuan, H.-C.2    Branz, H.M.3
  • 14
  • 15
    • 77953298175 scopus 로고    scopus 로고
    • Broadband light absorption enhancement in thin-film silicon solar cells
    • Wang, W., Wu, S., Reinhardt, K., Lu, Y. & Chen, S. Broadband light absorption enhancement in thin-film silicon solar cells. Nano Lett. 10, 2012-2018 (2010).
    • (2010) Nano Lett. , vol.10 , pp. 2012-2018
    • Wang, W.1    Wu, S.2    Reinhardt, K.3    Lu, Y.4    Chen, S.5
  • 16
    • 0036603274 scopus 로고    scopus 로고
    • Toward perfect antireflection coatings: Numerical investigation
    • Dobrowolski, J., Poitras, D., Ma, P., Vakil, H. & Acree, M. Toward perfect antireflection coatings: numerical investigation. Appl. Opt. 41, 3075-3083 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 3075-3083
    • Dobrowolski, J.1    Poitras, D.2    Ma, P.3    Vakil, H.4    Acree, M.5
  • 17
    • 70349653372 scopus 로고    scopus 로고
    • Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
    • Yuan, H.-C. et al. Efficient black silicon solar cell with a density-graded nanoporous surface: optical properties, performance limitations, and design rules. Appl. Phys. Lett. 95, 123501-123503 (2009).
    • (2009) Appl. Phys. Lett. , vol.95 , pp. 123501-123503
    • Yuan, H.-C.1
  • 18
    • 84950630091 scopus 로고
    • The optical properties of 'moth eye' antireflection surfaces
    • Wilson, S. & Hutley, M. The optical properties of 'moth eye' antireflection surfaces. J. Mod. Opt. 29, 993-1009 (1982).
    • (1982) J. Mod. Opt. , vol.29 , pp. 993-1009
    • Wilson, S.1    Hutley, M.2
  • 19
    • 0015840393 scopus 로고
    • Reduction of lens reflexion by the "moth eye" principle
    • Clapham, P. B. & Hutley, M. C. Reduction of lens reflexion by the "moth eye" principle. Nature 244, 281-282 (1973).
    • (1973) Nature , vol.244 , pp. 281-282
    • Clapham, P.B.1    Hutley, M.C.2
  • 20
    • 34249943476 scopus 로고    scopus 로고
    • Biomimetics of photonic nanostructures
    • Parker, A. R. & Townley, H. E. Biomimetics of photonic nanostructures. Nat. Nano 2, 347-353 (2007).
    • (2007) Nat. Nano , vol.2 , pp. 347-353
    • Parker, A.R.1    Townley, H.E.2
  • 21
    • 0033745593 scopus 로고    scopus 로고
    • Nanoscopic templates from oriented block copolymer films
    • Thurn-Albrecht, T. et al. Nanoscopic templates from oriented block copolymer films. Adv. Mater. 12, 787-791 (2000).
    • (2000) Adv. Mater. , vol.12 , pp. 787-791
    • Thurn-Albrecht, T.1
  • 22
    • 78649834544 scopus 로고    scopus 로고
    • Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers
    • Peng, Q., Tseng, Y.-C., Darling, S. B. & Elam, J. W. Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers. Adv. Mater. 22, 5129-5133 (2010).
    • (2010) Adv. Mater. , vol.22 , pp. 5129-5133
    • Peng, Q.1    Tseng, Y.-C.2    Darling, S.B.3    Elam, J.W.4
  • 23
    • 34948854470 scopus 로고    scopus 로고
    • Polymer self assembly in semiconductor microelectronics
    • Black, C. T. et al. Polymer self assembly in semiconductor microelectronics. IBM J. Res. Dev. 51, 605-633 (2007).
    • (2007) IBM J. Res. Dev. , vol.51 , pp. 605-633
    • Black, C.T.1
  • 24
    • 84867536693 scopus 로고    scopus 로고
    • Silicon patterning using self-assembled PS-b-PAA diblock copolymer masks for black silicon fabrication via plasma etching
    • Zhang, X. et al. Silicon patterning using self-assembled PS-b-PAA diblock copolymer masks for black silicon fabrication via plasma etching. Plasma Processes Polym. 9, 968-974 (2012).
    • (2012) Plasma Processes Polym. , vol.9 , pp. 968-974
    • Zhang, X.1
  • 25
    • 46749120668 scopus 로고    scopus 로고
    • Biomimetic interfaces for high-performance optics in the deep-UV light range
    • Lohmuller, T., Helgert, M., Sundermann, M., Brunner, R. & Spatz, J. P. Biomimetic interfaces for high-performance optics in the deep-UV light range. Nano Lett. 8, 1429-1433 (2008).
    • (2008) Nano Lett. , vol.8 , pp. 1429-1433
    • Lohmuller, T.1    Helgert, M.2    Sundermann, M.3    Brunner, R.4    Spatz, J.P.5
  • 27
    • 39349087173 scopus 로고    scopus 로고
    • Broadband moth-eye antireflection coatings on silicon
    • Sun, C.-H., Jiang, P. & Jiang, B. Broadband moth-eye antireflection coatings on silicon. Appl. Phys. Lett. 92, 061112-061113 (2008).
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 061112-061113
    • Sun, C.-H.1    Jiang, P.2    Jiang, B.3
  • 28
    • 0040191870 scopus 로고
    • Comparison of advanced plasma sources for etching applications. IV. Plasma induced damage in a helicon and a multipole electron cyclotron resonance source
    • Blayo, N. et al. Comparison of advanced plasma sources for etching applications. IV. Plasma induced damage in a helicon and a multipole electron cyclotron resonance source. J. Vac. Sci. Technol. B 12, 1340-1350 (1994).
    • (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 1340-1350
    • Blayo, N.1
  • 29
    • 21144462714 scopus 로고
    • Creation of deep gap states in Si during Cl2 or HBr plasma etch exposures
    • Awadelkarim, O. et al. Creation of deep gap states in Si during Cl2 or HBr plasma etch exposures. J. Vac. Sci. Technol. A 11, 1332-1336 (1993).
    • (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 1332-1336
    • Awadelkarim, O.1
  • 30
    • 3142552576 scopus 로고    scopus 로고
    • Analysis of the chemical composition and deposition mechanism of the SiOx:SiCly layer on the plasma chamber walls during silicon gate etching
    • Kogelschatz, M., Cunge, G. & Sadeghi, N. Analysis of the chemical composition and deposition mechanism of the SiOx:SiCly layer on the plasma chamber walls during silicon gate etching. J. Vac. Sci. Technol. A 22, 624-635 (2004).
    • (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 624-635
    • Kogelschatz, M.1    Cunge, G.2    Sadeghi, N.3
  • 31
    • 0036494223 scopus 로고    scopus 로고
    • Deposition of silicon oxychloride films on chamber walls during Cl2/O2 plasma etching of si
    • Ullal, S. J., Singh, H., Vahedi, V. & Aydil, E. S. Deposition of silicon oxychloride films on chamber walls during Cl2/O2 plasma etching of si. J. Vac. Sci. Technol., A 20, 499-506 (2002).
    • (2002) J. Vac. Sci. Technol., A , vol.20 , pp. 499-506
    • Ullal, S.J.1    Singh, H.2    Vahedi, V.3    Aydil, E.S.4
  • 32
    • 0035952881 scopus 로고    scopus 로고
    • Near-unity below-band-gap absorption by microstructured silicon
    • Wu, C. et al. Near-unity below-band-gap absorption by microstructured silicon. Appl. Phys. Lett. 78, 1850-1852 (2001).
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 1850-1852
    • Wu, C.1
  • 33
    • 0025592639 scopus 로고
    • Incorporation of oh radicals in anodic silicon oxide films studied by secondary-ion mass spectroscopy, X-ray photoelectron spectroscopy and IR analysis
    • Montero, I., Galan, L., De La Cal, E., Albella, J. & Pivin, J. Incorporation of oh radicals in anodic silicon oxide films studied by secondary-ion mass spectroscopy, X-ray photoelectron spectroscopy and IR analysis. Thin Solid Films 193, 325-332 (1990).
    • (1990) Thin Solid Films , vol.193 , pp. 325-332
    • Montero, I.1    Galan, L.2    De La Cal, E.3    Albella, J.4    Pivin, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.