Optical contrast determination of the thickness of SiO2 film on Si substrate partially covered by two-dimensional crystal flakes

Science Bulletin

Volumn 60, Issue 8, 2015, Pages 806-811

  Lu, Yan ^a   Li, Xiao Li ^a   Zhang, Xin ^a   Wu, Jiang Bin ^a   Tan, Ping Heng ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

2 D crystal flakes; Dielectric substrate; Numerical aperture; Optical contrast; Thickness

Indexed keywords

EID: 84941125160     PISSN: 20959273     EISSN: 20959281     Source Type: Journal    
DOI: 10.1007/s11434-015-0774-3     Document Type: Article

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