Modeling of a metallic truncated cone for electromagnetic capacitive sensors

Journal of Applied Physics

Volumn 118, Issue 7, 2015, Pages

  Bartolucci, Giancarlo ^a,b   Sardi, Giovanni Maria ^a   Marcelli, Romolo ^a   Proietti, Emanuela ^a   Lucibello, Andrea ^a   Stoja, Endri ^c   Frezza, Fabrizio ^d  

^a CNR   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

^c EPOKA UNIVERSITY   (Albania)

^d SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CAPACITANCE; COMPUTATIONAL ELECTROMAGNETICS; CYLINDERS (SHAPES); IMAGING SYSTEMS; SCANNING PROBE MICROSCOPY;

COMMERCIAL SIMULATORS; ELECTROMAGNETIC MODELING; MATHEMATICAL EXPRESSIONS; MICROWAVE IMAGING SYSTEMS; MICROWAVE SENSING; SCANNING MICROWAVE MICROSCOPIES; STRAY CAPACITANCES; SYSTEM CALIBRATION;

CAPACITIVE SENSORS;

EID: 84940118232     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4928466     Document Type: Article

References (17)

1. A. Imtiaz, T. M. Wallis, and P. Kabos, " Near-field scanning microwave microscopy: An emerging research tool for nanoscale metrology," in IEEE Microwave Magazine 15, 52-64 (2014). 10.1109/MMM.2013.2288711
2. G. M. Sacha, E. Sahagun, and J. J. Saenz, " A method for calculating capacitances and electrostatic forces in atomic force microscopy," J. Appl. Phys. 101 (2), 024310.1-024310.4 (2007). 10.1063/1.2424524
3. S. Hudlet, M. Saint Jean, C. Guthmann, and J. Berger, " Evaluation of the capacitive force between an atomic force microscopy tip and a metallic surface," Eur. Phys. J. B 2 (1), 5-10 (1998). 10.1007/s100510050219
4. B. M. Law and F. Rieutord, " Electrostatic forces in atomic force microscopy," Phys. Rev. B 66 (3), 035402 (2002). 10.1103/PhysRevB.66.035402
5. K. Lai, W. Kundhikanjana, M. A. Kelly, and Z.-X. Shen, " Modeling of cantilever-based near-field scanning microwave microscope," Rev. Sci. Instrum. 79, 063703 (2008). 10.1063/1.2949109
6. L. Fumagalli, G. Ferrari, M. Sampietro, and G. Gomila, " Dielectric-constant measurement of thin insulating films at low frequency by nanoscale capacitance microscopy," Appl. Phys. Lett. 91 (24), 243110.1-243110.3 (2007). 10.1063/1.2821119
7. G. Gomila, J. Toset, and L. Fumagalli, " Nanoscale capacitance microscopy of thin dielectric films," J. Appl. Phys. 104 (2), 024315.1-024315.8 (2008). 10.1063/1.2957069
8. G. Gramse, I. Caruso, J. Toset, L. Fumagalli, and G. Gomila, " Quantitative dielectric constant measurement of thin films by DC electrostatic force microscopy," Nanotechnology 20, 3957021-8 (2009). 10.1088/0957-4484/20/39/395702
9. L. Fumagalli, G. Gramse, D. Esteban-Ferrer, M. A. Edwards, and G. Gomila, " Quantifying the dielectric constant of thick insulators using electrostatic force microscopy," Appl. Phys. Lett. 96 (18), 183107.1-183107.3 (2010). 10.1063/1.3427362
10. L. Fumagalli, M. A. Edwards, and G. Gomila, " Quantitative electrostatic force microscopy with sharp silicon tips," Nanotechnology 25, 495701 (2014). 10.1088/0957-4484/25/49/495701
11. G. Gomila, G. Gramse, and L. Fumagalli, " Finite-size effects and analytical modeling of electrostatic force microscopy applied to dielectric films," Nanotechnology 25, 255702 (2014). 10.1088/0957-4484/25/25/255702
12. See http://www.nanoworld.com for details about typical manufacturing processes and shapes of AFM tips used for both AFM and SMM purposes.
13. R. W. Scharstein, " Capacitance of a tube," J. Electrost. 65 (1), 21-29 (2007). 10.1016/j.elstat.2006.05.005
14. P. Azimi and H. Golnabi, " Precise formulation of electrical capacitance for a cylindrical capacitive sensor," J. Appl. Sci. 9 (8), 1556-1561 (2009). 10.3923/jas.2009.1556.1561
15. H. Golnabi and P. Azimi, " Design and performance of a cylindrical capacitive sensor to monitor the electrical properties," J. Appl. Sci. 8 (9), 1699-1705 (2008). 10.3923/jas.2008.1699.1705
16. F. Alessandri, G. Bartolucci, and R. Sorrentino, " Admittance matrix formulation of waveguide discontinuity problems: Computer-aided design of branch guide directional couplers," IEEE Trans. Microwave Theory Tech. 36 (2), 394-403 (1988). 10.1109/22.3528
17. J. Vanderlinde, Classical Electromagnetic Theory (John Wiley and Sons, 1993).