A nanowire gauge factor extraction method for material comparison and in-line monitoring

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2015-February, Issue February, 2015, Pages 361-364

  Ouerghi, Issam ^a   Philippe, Julien ^a   Ladner, Carine ^a   Scheiblin, Pascal ^a   Duraffourg, Laurent ^a   Hentz, Sebastien ^a   Ernst, Thomas ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GAGES; MECHANICS; MEMS; NANOCRYSTALLINE MATERIALS; NANOWIRES; SILICON WAFERS; VOLTAGE MEASUREMENT;

CONVENTIONAL TECHNIQUES; CRYSTALLINE STRUCTURE; DIRECT MEASUREMENT; EXTRACTION METHOD; IN-LINE MONITORING; LOW-COST SOLUTION; PIEZORESISTIVE MATERIALS; REPRODUCIBILITIES;

EXTRACTION;

EID: 84931034298     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2015.7050964     Document Type: Conference Paper

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