Deposition of MnO anode and MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor

Chemistry of Materials

Volumn 27, Issue 10, 2015, Pages 3628-3635

  Mattelaer, Felix ^a   Vereecken, Philippe M ^b,c   Dendooven, Jolien ^a   Detavernier, Christophe ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ANODES; ATOMIC LAYER DEPOSITION; CATHODES; MANGANESE OXIDE; THIN FILM LITHIUM ION BATTERIES; THIN FILMS; TRANSITION METALS;

AS-DEPOSITED FILMS; CATHODE THIN FILMS; CONSTANT GROWTH RATES; CONTROLLED TEMPERATURE; LIGAND EXCHANGES; OXIDATION STATE; PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; THIN FILM CATHODES;

GROWTH RATE;

EID: 84930624295     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/acs.chemmater.5b00255     Document Type: Article

References (54)

1. Baggetto, L.; Niessen, R. A. H.; Roozeboom, F.; Notten, P. H. L. High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration Adv. Funct. Mater. 2008, 18, 1057-1066
2. Oudenhoven, J. F. M.; Baggetto, L.; Notten, P. H. L. All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts Adv. Energy Mater. 2011, 1, 10-33
3. Long, J. W.; Dunn, B.; Rolison, D. R.; White, H. S. Three-Dimensional Battery Architectures Chem. Rev. 2004, 104, 4463-4492
4. Wang, Y.; Cao, G. Developments in Nanostructured Cathode Materials for High-Performance Lithium-Ion Batteries Adv. Mater. 2008, 20, 2251-2269
5. Notten, P. H. L.; Roozeboom, F.; Niessen, R. a. H.; Baggetto, L. 3-D Integrated All-Solid-State Rechargeable Batteries Adv. Mater. 2007, 19, 4564-4567
6. Dudney, N. J. Solid-State Thin-Film Rechargeable Batteries Mater. Sci. Eng., B 2005, 116, 245-249
7. Liu, J.; Sun, X. Elegant Design of Electrode and Electrode/Electrolyte Interface in Lithium-Ion Batteries by Atomic Layer Deposition Nanotechnology 2015, 26, 024001
8. Vereecken, P. M.; Huyghebaert, C. (Invited) Conformal Deposition for 3D Thin-Film Batteries ECS Trans. 2013, 58, 111-118
9. Boukhalfa, S.; Evanoff, K.; Yushin, G. Atomic Layer Deposition of Vanadium Oxide on Carbon Nanotubes for High-Power Supercapacitor Electrodes Energy Environ. Sci. 2012, 5, 6872-6879
10. 4 in Lithium-Ion Batteries with Ultrathin Surface Coatings J. Nanosci. Nanotechnol. 2012, 12, 7113-7120
11. Wu, M.-S.; Chiang, P.-C. J. Electrochemically Deposited Nanowires of Manganese Oxide as an Anode Material for Lithium-Ion Batteries Electrochem. Commun. 2006, 8, 383-388
12. Kordesh, K.; Weissenbacher, M. Rechargeable Alkaline Manganese Dioxide/Zinc Batteries J. Power Sources 1994, 51, 61-78
13. Martha de Souza, C. C. B.; Corrêa de Oliveira, D.; Tenório, J. A. S. Characterization of Used Alkaline Batteries Powder and Analysis of Zinc Recovery by Acid Leaching J. Power Sources 2001, 103, 120-126
14. Landorf, R. W.; Licht, S. J. Sputtered Manganese Dioxide as Counterelectrodes in Thin Film Capacitors J. Electrochem. Soc. 1972, 119, 430-433
15. Zhang, H.; Cao, G.; Wang, Z.; Yang, Y.; Shi, Z.; Gu, Z. Growth of Manganese Oxide Nanoflowers on Vertically-Aligned Carbon Nanotube Arrays for High-Rate Electrochemical Capacitive Energy Storage Nano Lett. 2008, 8, 2664-2668
16. Hu, C.-C.; Tsou, T.-W. Ideal Capacitive Behavior of Hydrous Manganese Oxide Prepared by Anodic Deposition Electrochem. Commun. 2002, 4, 105-109
17. Babakhani, B.; Ivey, D. G. Anodic Deposition of Manganese Oxide Electrodes with Rod-Like Structures for Application as Electrochemical Capacitors J. Power Sources 2010, 195, 2110-2117
18. Ma, J.; Chuah, G. K.; Jaenicke, S.; Gopalakrishnan, R.; Tan, K. L. Catalysis by Manganese Oxide Monolayers Part 2: Zirconia Support Ber. Bunsengesellschaft Phys. Chem. 1996, 100, 585-593
19. 2 Catalysts Catal. Lett. 1997, 46, 229-234
20. Gorlin, Y.; Jaramillo, T. F. A Bifunctional Nonprecious Metal Catalyst for Oxygen Reduction and Water Oxidation J. Am. Chem. Soc. 2010, 132, 13612-13614
21. Calegaro, M.; Lima, F.; Ticianelli, E. Oxygen Reduction Reaction on Nanosized Manganese Oxide Particles Dispersed on Carbon in Alkaline Solutions J. Power Sources 2006, 158, 735-739
22. Diab, N.; Schuhmann, W. Electropolymerized Manganese Porphyrin/Polypyrrole Films as Catalytic Surfaces for the Oxidation of Nitric Oxide Electrochim. Acta 2001, 47, 265-273
23. Singoredjo, L.; Korver, R.; Kapteijn, F.; Moulijn, J. Alumina Supported Manganese Oxides for the Low-Temperature Selective Catalytic Reduction of Nitric Oxide with Ammonia Appl. Catal., B 1992, 1, 297-316
24. 3 at Low Temperatures Appl. Catal., A 2007, 327, 261-269
25. 3 over Iron and Manganese Oxides Supported on Titania Appl. Catal., B 2003, 44, 217-225
26. Hasan, M. A.; Zaki, M. I.; Pasupulety, L.; Kumari, K. Promotion of the Hydrogen Peroxide Decomposition Activity of Manganese Oxide Catalysts Appl. Catal., A 1999, 181, 171-179
27. Einaga, H.; Ibusuki, T.; Futamura, S. Performance Evaluation of a Hybrid System Comprising Silent Discharge Plasma and Manganese Oxide Catalysts for Benzene Decomposition IEEE Trans. Ind. Appl. 2001, 37, 1476-1482
28. Li, W.; Oyama, S. T. Mechanism of Ozone Decomposition on a Manganese Oxide Catalyst. 2. Steady-State and Transient Kinetic Studies J. Am. Chem. Soc. 1998, 120, 9047-9052
29. Neishi, K.; Aki, S.; Matsumoto, K.; Sato, H.; Itoh, H.; Hosaka, S.; Koike, J. Formation of a Manganese Oxide Barrier Layer with Thermal Chemical Vapor Deposition for Advanced Large-Scale Integrated Interconnect Structure Appl. Phys. Lett. 2008, 93, 032106-1-032106-3
30. Pang, S.-C.; Anderson, M. A.; Chapman, T. W. Novel Electrode Materials for Thin-Film Ultracapacitors: Comparison of Electrochemical Properties of Sol-Gel-Derived and Electrodeposited Manganese Dioxide J. Electrochem. Soc. 2000, 147, 444
31. Chigane, M.; Ishikawa, M. Manganese Oxide Thin Film Preparation by Potentiostatic Electrolyses and Electrochromism J. Electrochem. Soc. 2000, 147, 2246-2251
32. Etman, A. S.; Radisic, A.; Emara, M. M.; Huyghebaert, C.; Vereecken, P. M. Effect of Film Morphology on the Li Ion Intercalation Kinetics in Anodic Porous Manganese Dioxide Thin Films J. Phys. Chem. C 2014, 118, 9889-9898
33. Nakamura, T.; Tai, R.; Nishimura, T.; Tachibana, K. Spectroscopic Study on Metallorganic Chemical Vapor Deposition of Manganese Oxide Films J. Electrochem. Soc. 2005, 152, C584-C587
34. 2O Thin Solid Films 2009, 517, 5658-5665
35. Lu, H.; Scarel, G.; Li, X.; Fanciulli, M. Thin MnO and NiO Films Grown Using Atomic Layer Deposition from Ethylcyclopentadienyl Type of Precursors J. Cryst. Growth 2008, 310, 5464-5468
36. Nilsen, O.; Fjellvåg, H.; Kjekshus, A. Growth of Manganese Oxide Thin Films by Atomic Layer Deposition Thin Solid Films 2003, 444, 44-51
37. Nilsen, O.; Foss, S.; Fjellvåg, H.; Kjekshus, A. Effect of Substrate on the Characteristics of Manganese(IV) Oxide Thin Films Prepared by Atomic Layer Deposition Thin Solid Films 2004, 468, 65-74
38. Puurunen, R. L. Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/Water Process J. Appl. Phys. 2005, 97, 121301-1-121301-52
39. 2 Films Grown by Ozone Based Atomic Layer Deposition Appl. Phys. Lett. 2011, 98, 162902
40. 2 Layers Grown by Atomic Layer Deposition Thin Solid Films 2014, 550, 59-64
41. 2O J. Appl. Phys. 2007, 102, 083521
42. Musschoot, J.; Xie, Q.; Deduytsche, D.; Van den Berghe, S.; Van Meirhaeghe, R.; Detavernier, C. Atomic Layer Deposition of Titanium Nitride from TDMAT Precursor Microelectron. Eng. 2009, 86, 72-77
43. 3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition J. Electrochem. Soc. 2010, 157, G111-G116
44. Langereis, E.; Heil, S. B. S.; Knoops, H. C. M.; Keuning, W.; Sanden, M. C. M. v. d.; Kessels, W. M. M. In Situ Spectroscopic Ellipsometry as a Versatile Tool for Studying Atomic Layer Deposition J. Phys. D: Appl. Phys. 2009, 42, 073001
45. Putkonen, M.; Niinistö, L. In Precursor Chemistry of Advanced Materials; Fischer, R. A., Ed.; Topics in Organometallic Chemistry 9; Springer: Berlin Heidelberg, 2005; pp 125-145.
46. Nilsen, O.; Fjellvg, H.; Kjekshus, A. Inexpensive Set-up for Determination of Decomposition Temperature for Volatile Compounds Thermochim. Acta 2003, 404, 187-192
47. Nelson, A. J.; Reynolds, J. G.; Roos, J. W. Core-Level Satellites and Outer Core-Level Multiplet Splitting in Mn Model Compounds. In The 46th International Symposium of the American Vacuum Society, Seattle, Washington (USA), 2000; pp 1072-1076.
48. Di Castro, V.; Polzonetti, G. XPS Study of MnO Oxidation J. Electron Spectrosc. Relat. Phenom. 1989, 48, 117-123
49. Foord, J. S.; Jackman, R. B.; Allen, G. C. An X-ray Photoelectron Spectroscopic Investigation of the Oxidation of Manganese Philos. Mag. A 1984, 49, 657-663
50. Grundy, A. N.; Hallstedt, B.; Gauckler, L. J. Assessment of the Mn-O System J. Phase Equilib. 2003, 24, 21-39
51. 4-MnO Equilibria Am. J. Sci. 1960, 258, 66-78
52. Fang, X.; Lu, X.; Guo, X.; Mao, Y.; Hu, Y.-S.; Wang, J.; Wang, Z.; Wu, F.; Liu, H.; Chen, L. Electrode Reactions of Manganese Oxides for Secondary Lithium Batteries Electrochem. Commun. 2010, 12, 1520-1523
53. Thackeray, M. M.; Kock, A. d.; Rossouw, M. H.; Liles, D.; Bittihn, R.; Hoge, D. Spinel Electrodes from the LiMnO System for Rechargeable Lithium Battery Applications J. Electrochem. Soc. 1992, 139, 363-366
54. Li, X.; Meng, X.; Liu, J.; Geng, D.; Zhang, Y.; Banis, M. N.; Li, Y.; Yang, J.; Li, R.; Sun, X.; Cai, M.; Verbrugge, M. W. Tin Oxide with Controlled Morphology and Crystallinity by Atomic Layer Deposition onto Graphene Nanosheets for Enhanced Lithium Storage Adv. Funct. Mater. 2012, 22, 1647-1654