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Volumn 404, Issue 1-2, 2003, Pages 187-192

Inexpensive set-up for determination of decomposition temperature for volatile compounds

Author keywords

ALCVD; ALD; ALE; Co(thd)2; Cr(thd)3; Cu(thd)2; CVD; Fe(thd)3; La(thd)3; Mn(thd)3; Ni(thd)2; Thermal decomposition; VO(thd) 2; Zn(thd)2; Diketonate

Indexed keywords

CALCIUM; CHROMIUM; COPPER; HEPTANE; IRON; LANTHANUM; MANGANESE; NICKEL; VANADIUM; VOLATILE AGENT; ZINC;

EID: 0345687200     PISSN: 00406031     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6031(03)00149-7     Document Type: Article
Times cited : (16)

References (14)
  • 1
    • 0000836443 scopus 로고    scopus 로고
    • H.S. Nalwa (Ed.), Academic Press, San Diego, CA
    • M. Ritala, A. Leskelä, in: H.S. Nalwa (Ed.), Handbook of Thin Film Materials, vol. 1, Academic Press, San Diego, CA, 2001, p. 103.
    • (2001) Handbook of Thin Film Materials , vol.1 , pp. 103
    • Ritala, M.1    Leskelä, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.