Low power consumption micro C2H5OH gas sensor based on micro-heater and screen printing technique

Sensors and Actuators, B: Chemical

Volumn 187, Issue , 2013, Pages 598-603

  Moon, S E ^a   Lee, H K ^a   Choi, N J ^a   Lee, J ^a   Choi, C A ^a   Yang, W S ^a   Kim, J ^a   Jong, J J ^b   Yoo, D J ^b  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Sentech Korea   (South Korea)

Author keywords

Alcohol; Gas sensor; Micro heater; Surface micromachining

Indexed keywords

ALCOHOLS; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; ELECTRIC POWER UTILIZATION; GAS DETECTORS; GASES; MECHANICAL STABILITY; MEMS; METALS; MICROMACHINING; MOS DEVICES; OXIDE SEMICONDUCTORS; PRECIPITATION (CHEMICAL); SCREEN PRINTING; SURFACE MICROMACHINING; THICK FILMS; TIN OXIDES;

COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; COPRECIPITATION METHOD; DIRECT CURRENT POWER; LOW-POWER CONSUMPTION; LOWER-POWER CONSUMPTION; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO-HEATERS; SCREEN PRINTING TECHNIQUE;

HEATING EQUIPMENT;

EID: 84885474055     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.05.002     Document Type: Article

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