Semiconductor-type MEMS gas sensor for real-time environmental monitoring applications

ETRI Journal

Volumn 35, Issue 4, 2013, Pages 617-624

  Moon, Seung Eon ^a   Choi, Nak Jin ^b   Lee, Hyung Kun ^c   Lee, Jaewoo ^d   Yang, Woo Seok ^e  

^a Seoul National University   (South Korea)

^b Pukyong National University   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^d Korea University   (South Korea)

^e Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Gas sensor; Metal oxide; Microheater; Nanopowder

Indexed keywords

ENVIRONMENTAL MONITORING; METAL OXIDES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROHEATER; NANO POWDERS; PERSONAL DIGITAL ASSISTANT PHONES; SEMICONDUCTOR-TYPE; SIGNAL PROCESSING CHIPS;

BLUETOOTH; ENVIRONMENTAL ENGINEERING; GAS DETECTORS; HEATING EQUIPMENT; INFORMATION TECHNOLOGY; MEMS; METALLIC COMPOUNDS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NITROGEN COMPOUNDS; PERSONAL DIGITAL ASSISTANTS; SIGNAL PROCESSING; TELEPHONE SETS;

CHEMICAL SENSORS;

EID: 84881072574     PISSN: 12256463     EISSN: 22337326     Source Type: Journal    
DOI: 10.4218/etrij.13.1912.0008     Document Type: Article

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