Encapsulation of semiconductor gas sensors with gas barrier films for USN application

ETRI Journal

Volumn 34, Issue 5, 2012, Pages 713-718

  Lee, Hyung Kun ^a   Yang, Woo Seok ^a   Choi, Nak Jin ^a   Moon, Seung Eon ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Encapsulation; Gas barrier; Gas sensor; Ubiquitous sensor network (USN)

Indexed keywords

ACTIVATION PROCESS; ACTIVATION TECHNIQUES; BARRIER MATERIAL; GAS BARRIER; GAS BARRIER FILMS; GAS BARRIER LAYERS; POLY(ETHYLENE-CO-VINYL ALCOHOL); POLYVINYLIDENE DIFLUORIDE; PVDF FILMS; SEMICONDUCTOR GAS SENSORS; SENSING MATERIAL; UBIQUITOUS SENSOR NETWORKS;

CHEMICAL SENSORS; DECOMPOSITION; ENCAPSULATION; GAS DETECTORS; GAS PERMEABLE MEMBRANES; INDIUM; MOBILE TELECOMMUNICATION SYSTEMS; SENSOR NODES;

GASES;

EID: 84867301786     PISSN: 12256463     EISSN: 22337326     Source Type: Journal    
DOI: 10.4218/etrij.12.0112.0266     Document Type: Article

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