SCOPUS 정보 검색 플랫폼

Volumn 5, Issue 5, 2015, Pages

Multi-strata subsurface laser die singulation to enable defect-free ultra-thin stacked memory dies

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; PULSED LASERS;

DEFECT-FREE; DIE STACK; HIGH DISLOCATION DENSITY; LASER ENERGIES; SINGULATION; STACKED MEMORY; STRATA INTERACTION; ULTRA-THIN;

DIES;

EID: 84929353198 PISSN: None EISSN: 21583226 Source Type: Journal
DOI: 10.1063/1.4921205 Document Type: Article

Times cited : (5)

References (12)

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