Thermo-elastic-plastic analysis on internal processing phenomena of single-crystal silicon by nanosecond laser

Journal of Laser Micro Nanoengineering

Volumn 1, Issue 3, 2006, Pages 231-235

  Monodane, Takeshi ^a   Ohmura, Etsuji ^a   Fukuyo, Fumitsugu ^b   Fukumitsu, Kenshi ^b   Morita, Hideki ^b   Hirata, Yoshinori ^b  

^a OSAKA UNIVERSITY   (Japan)

^b CENTRAL RESEARCH LABORATORY   (Japan)

Author keywords

Absorption coefficient; Internal processing; Laser dicing; Nanosecond laser; Silicon

Indexed keywords

EID: 84964272864     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2006.03.0016     Document Type: Article

References (10)

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