Fabrication of nanoporous silicon dioxide/silicon nitride membranes using etched ion track technique

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 12-13, 2008, Pages 3166-3169

  Zhang, W M ^a   Li, J ^a   Cao, L X ^a   Wang, Y G ^a   Guo, W ^a   Liu, K X ^a   Xue, J M ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Ion track; Nanoporous membrane; Silicon dioxide; Silicon nitride

Indexed keywords

IRRADIATION; SILICA; SILICON NITRIDE;

ION TRACKS; NANOPOROUS MEMBRANES; NANOPOROUS SILICON DIOXIDE;

NANOSTRUCTURED MATERIALS;

EID: 44649103226     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.213     Document Type: Article

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