Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting

Sensors and Actuators, A: Physical

Volumn 228, Issue , 2015, Pages 95-103

  Tao, Kai ^a   Miao, Jianmin ^a   Lye, Sun Woh ^a   Hu, Xiao ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Electret; Energy harvesting; MEMS; Sandwich structure; Two dimensional

Indexed keywords

ELECTRETS; ENERGY HARVESTING; KINETIC ENERGY; KINETICS; MEMS; SANDWICH STRUCTURES; SEISMOLOGY; TWO DIMENSIONAL; VIBRATION ANALYSIS;

CAPACITIVE CIRCUITS; EXPERIMENTAL ANALYSIS; HORIZONTAL DAMPING; IN-PLANE DIRECTION; SEISMIC MASS SYSTEM; TWO DIMENSIONAL (2 D); VIBRATION SOURCES; VIBRATIONAL ENERGY HARVESTING;

ELECTRIC GENERATORS;

EID: 84925697574     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2015.02.021     Document Type: Article

References (36)

1. N.S. Hudak, and G.G. Amatucci Small-scale energy harvesting through thermoelectric, vibration, and radiofrequency power conversion Appl. Phys. Lett. 103 2008 101301
2. M.T. Penella, and M. Gasulla A Review of Commercial Energy Harvesters for Autonomous Sensors Proceedings of Instrumentation and Measurement Technology Conference (IMTC) Warsaw 2007 1 5
3. S.P. Beeby, M.J. Tudor, and N.M. White Energy harvesting vibration sources for microsystems applications Meas. Sci. Technol. 17 2006 175 195
4. P.D. Mitcheson, E.M. Yeatman, G.K. Rao, A.S. Holmes, and T.C. Green Energy harvesting from human and machine motion for wireless electronic devices Proc. IEEE 96 2008 1457 1486
5. D.P. Arnold Review of microscale magnetic power generation IEEE Trans. Magn. 43 2007 3940 3951
6. N.N. Ching, H.Y. Wong, W.J. Li, P. Leong, and Z. Wen A laser-micromachined multi-modal resonating power transducer for wireless sensing systems Sens. and Actuators A: Phys. 97 2002 685 690
7. S. Roundy, and E. Takahashi A planar electromagnetic energy harvesting transducer using a multi-pole magnetic plate Sens. Actuators A: Phys. 195 2013 98 104
8. I. Sari, T. Balkan, and H. Kulah An electromagnetic micro power generator for wideband environmental vibrations Sens. Actuators A: Phys. 145 2008 405 413
9. H.S. Kim, J.H. Kim, and J. Kim A review of piezoelectric energy harvesting based on vibration Int. J. Precis. Eng. Manuf. 12 2011 1129 1141
10. M. Ferrari, V. Ferrari, M. Guizzetti, D. Marioli, and A. Taroni Piezoelectric multifrequency energy converter for power harvesting in autonomous microsystems Sens. Actuators A: Phys. 142 2008 329 335
11. I. Kuehne, A. Frey, D. Marinkovic, G. Eckstein, and H. Seidel Power MEMS - a capacitive vibration-to-electrical energy converter with built-in voltage Sens. Actuators A: Phys. 142 2008 263 269
12. F. Wang, and O. Hansen Electrostatic energy harvesting device with out-of-the-plane gap closing scheme Sens. Actuators A: Phys. 211 2014 131 137
13. Y. Suzuki Recent progress in MEMS electret generator for energy harvesting IEEJ Trans. Electr. Electron. Eng. 6 2011 101 111
14. H. Okamoto, T. Suzuki, K. Mori, Z. Cao, T. Onuki, and H. Kuwano The advantages and potential of electret-based vibration-driven micro energy harvesters Int. J. Energy Res. 33 2009 1180 1190
15. J. Boland, C.Y. Heng, Y. Suzuki, and Y.C. Tai Micro electret power generator 16th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS'03) Kyoto 2003 538 541
16. L. Hsi-wen, W. Rus, and T. Yu-Chong A simple micro electret power generator 20th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS'07) Hyogo 2007 859 862
17. Y. Naruse, N. Matsubara, K. Mabuchi, M. Izumi, and S. Suzuki Electrostatic micro power generation from low-frequency vibration such as human motion J. Micromech. Microeng. 19 2009 094002
18. A. Modafe, N. Ghalichechian, A. Frey, J.H. Lang, and R. Ghodssi Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion J. Micromech. Microeng. 16 2006 S182
19. L.M. Miller, E. Halvorsen, T. Dong, and P.K. Wright Modeling and experimental verification of low-frequency MEMS energy harvesting from ambient vibrations J. Micromech. Microeng. 21 2011 045029
20. B. Yang, C. Lee, R.K. Kotlanka, J. Xie, and S.P. Lim A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations J. Micromech. Microeng. 20 2010 065017
21. Z. Yong, S.O.R. Moheimani, and M.R. Yuce A 2-DOF MEMS ultrasonic energy harvester IEEE Sens. J. 11 2011 155 161
22. U. Bartsch, J. Gaspar, and O. Paul Low-frequency two-dimensional resonators for vibrational micro energy harvesting J. Micromech. Microeng. 20 2010 035016
23. H.C. Liu, B.W. Soon, N. Wang, C.J. Tay, C.G. Quan, and C. Lee Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes J. Micromech. Microeng. 22 2012 125020
24. M.A. Hopcroft, W.D. Nix, and T.W. Kenny What is the Young's modulus of silicon? J. Microelectromech. Syst. 19 2010 229 238
25. D. Hoffmann, B. Folkmer, and Y. Manoli Fabrication, characterization and modelling of electrostatic micro-generators J. Micromech. Microeng. 19 2009 094001
26. S. Boisseau, G. Despesse, and A. Sylvestre Optimization of an electret-based energy harvester Smart Mater. Struct. 19 2010 075015
27. Y. Suzuki, D. Miki, M. Edamoto, and M. Honzumi A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications J. Micromech. Microeng. 20 2010 104002
28. K. Tao, S. Liu, S. Lye, J.M. Miao, and X. Hu A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting J. Micromech. Microeng. 24 2014 065022
29. S.W. Liu, Z.Y. Shen, S.W. Lye, and J.M. Miao Stable micro sized electret array produced by localized charging using a silicon shadow mask Micro Nano Lett. 7 2012 1094 1096
30. Y. Minakawa, R. Chen, and Y. Suzuki X-shaped-spring enhanced MEMS electret generator for energy harvesting 17th Int. Conf. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 13) Barcelona 2013 2241 2244
31. S.P. Beeby, R.N. Torah, M.J. Tudor, P. Glynne-Jones, T.O. Donnell, and C.R. Saha A micro electromagnetic generator for vibration energy harvesting J. Micromech. Microeng. 17 2007 1257
32. H. Wu, L. Tang, Y. Yang, and C.K. Soh Feasibility study of multi-directional vibration energy harvesting with a frame harvester SPIE Smart Structures and Materials+ Nondestructive Evaluation and Health Monitoring. International Society for Optics and Photonics 2014 905703-905703
33. J. Yang, X. Yue, Y. Wen, P. Li, Q. Yu, and X. Bai Design and analysis of a 2D broadband vibration energy harvester for wireless sensors Sens. Actuators A: Phys. 205 2014 47 52
34. S. Kim, and K. Chun 2D vibration based MEMS energy harvester International Conference on Renewable Energies and Power Quality Spain 2012
35. U. Bartsch, J. Gaspar, and O. Paul A 2D electret-based resonant micro energy harvester 22nd IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS'09) Hong Kong 2009 1043 1046
36. T. Masaki, K. Sakurai, T. Yokoyama, M. Ikuta, H. Sameshima, and M. Doi Power output enhancement of a vibration-driven electret generator for wireless sensor applications J. Micromech. Microeng. 21 2011 104004