Stable micro sized electret array produced by localised charging using a silicon shadow mask

Micro and Nano Letters

Volumn 7, Issue 11, 2012, Pages 1094-1096

  Liu, S W ^a   Shen, Z Y ^a   Lye, S W ^a   Miao, J M ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE LEAKAGE; CHARGING EFFICIENCY; CORONA CHARGING; ELECTRIC FIELD GRADIENTS; FAST CHARGES; LOCALISED; SHADOW MASK;

ELECTRIC FIELDS;

ELECTRETS;

SILICON;

ARTICLE; ELECTRIC FIELD; ELECTRONICS;

EID: 84878358460     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2012.0639     Document Type: Article

References (19)

1. Goel M. Electret sensors, filters and MEMS devices: new challenges in materials research Curr. Sci. 0011-3891 2003 85 4 443-453
2. - 10.1002/tee.20631 Suzuki Y. Recent progress in MEMS electret generator for energy harvesting IEEJ Trans. Electr. Electron. Eng. 2011 6 2 101-111
3. Le C.P. Halvorsen E. Evaluation of parameters for electrostatic energy harvesters DTIP of MEMS and MOEMS - Symp. on Design, Test, Integration and Packaging of MEMS/MOEMS 2009 286-291 art. no. 4919502
4. Liu S.W. Lye S.W. Miao J.M. Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS) 2012 Paris, France 1277-1280
5. - 10.1088/0960-1317/19/11/115025 Basset P. Galayko D. Paracha A.M. Marty F. Dudka A. Bourouina T. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester J. Micromech. Microeng. 0960-1317 2009 19 11 art. no 115024
6. - 10.1016/j.mee.2012.03.016 Wang F. Bertelsen C. Skands G. Pedersen T. Hansen O. Reactive ion etching of polymer materials for an energy harvesting device Microelectron. Eng. 0167-9317 2012 97 227-230
7. - 10.1063/1.3058601 Ono T. Akagi T. Ichiki T. Anisotropic etching of amorphous perfluoropolymer films in oxygen-based inductively coupled plasmas J. Appl. Phys. 0021-8979 2009 105 1 art. no 013314
8. - 10.1088/0960-1317/20/10/104002 Suzuki Y. Miki D. Edamoto M. Honzumi M. A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications J. Micromech. Microeng. 0960-1317 2010 20 10 art. no. 104002
9. - 10.1088/0960-1317/21/6/065001 Yang Z. Wang J. Zhang J. A high-performance micro electret power generator based on microball bearings J. Micromech. Microeng. 0960-1317 2011 21 6 art. no. 065001
10. - 10.1143/JJAP.44.5062 Genda T. Tanaka S. Esashi M. Charging method of micropatterned electrets by contact electrification using mercury Jpn. J. Appl. Phys. 1, Regul. Pap. Brief Commun. Rev. Pap. 2005 44 7A 5062-5067
11. - 10.1109/TDEI.2010.5539666 Leonov V. Van Schaijk R. Patterning of inorganic electrets IEEE Trans. Dielectr. Electr. Insul. 1070-9878 2010 17 4 994-1000
12. - 10.1590/S0103-97331999000200009 Giacometti J.A. Fedosov S. Costa M.M. Corona charging of polymers: recent advances on constant current charging Braz. J. Phys. 0103-9733 1999 29 2 269-279
13. - 10.1109/94.625648 Sessler G.M. Charge distribution and transport in polymers IEEE Trans. Dielectr. Electr. Insul. 1070-9878 1997 4 5 614-628
14. - 10.1088/0022-3727/42/21/215205 Belevtsev A.A. Firsov K.N. Yu Kazantsev S. Kononov I.G. Electron detachment instability and self-organization in strongly electronegative polyatomic gases J. Phys. D. Appl. Phys. 0022-3727 2009 42 21 art. no. 215205
15. - 10.1149/1.2814081 Dixit P. Miao J. High aspect ratio vertical through-vias for 3D MEMS packaging applications by optimized three-step deep RIE J. Electrochem. Soc. 0013-4651 2008 155 2 H85-H91
16. - 10.1109/94.841819 Salah Khalil M. The role of BaTiO3 in modifying the DC breakdown strength of LDPE IEEE Trans. Dielectr. Electr. Insul. 1070-9878 2000 7 2 261-268
17. Tsutsumino T. Suzuki Y. Kasagi N. Tsurumi Y. High-performance polymer electret for micro seismic generator Proc. 5th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Power MEMS 2005 Tokyo Japan 9-12
18. - 10.1109/28.158851 Altafim R.A.C. Giacometti J.A. Janiszewski J.M. An electret transducer for impulse voltage measurements IEEE Trans. Ind. Appl. 0093-9994 1992 28 5 1217-1222
19. - 10.1088/0022-3727/11/6/016 Baum E.A. Lewis T.J. Toomer R. The lateral motion of charge on thin films of polyethylene terephthalate J. Phy. D. Appl. Phys. 1978 11 6 963-977