Combinatorial thin film composition mapping using three dimensional deposition profiles

Review of Scientific Instruments

Volumn 86, Issue 3, 2015, Pages

  Suram, Santosh K ^a   Zhou, Lan ^a   Becerra Stasiewicz, Natalie ^a   Kan, Kevin ^a   Jones, Ryan J R ^a   Kendrick, Brian M ^b   Gregoire, John M ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Kurt J Lesker Company   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); DESIGN OF EXPERIMENTS; ENERGY DISPERSIVE SPECTROSCOPY; FLUORESCENCE SPECTROSCOPY; PHYSICAL VAPOR DEPOSITION; QUARTZ; THIN FILMS; VAPOR DEPOSITION; X RAY SPECTROSCOPY;

ADVANCED MANUFACTURING; COMBINATORIAL SYNTHESIS; COMBINATORIAL THIN FILMS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; GENERATION TECHNOLOGIES; QUARTZ CRYSTAL MONITORS; ROTATIONAL DEGREES OF FREEDOM; X RAY FLUORESCENCE SPECTROSCOPY;

DEPOSITION;

EID: 84925068371     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.4914466     Document Type: Article

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