SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 4, 2008, Pages 1030-1036

A model for calculating resputter rates in codeposition

(2) Gregoire, J M a Van Dover, R B a

a Cornell University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY NUMBERS; CO-DEPOSITION; CODEPOSITED; COMBINATORIAL RESEARCH; DC-MAGNETRON SPUTTERING; DEPOSITION PROFILES; ELEMENTAL COMPOSITIONS; FILM COMPOSITIONS; GAS ATOMS; HIGH-THROUGHPUT (HT); IN COMPOSITION; INDIVIDUAL (PSS 544-7); PARAMETRIZATIONS; POW ERFUL TOOL; RE-SPUTTERING;

ATOMIC PHYSICS; ATOMS; CHEMICAL ANALYSIS; LEAD; LIQUID PHASE EPITAXY; MAGNETRON SPUTTERING; MOLECULAR BEAM EPITAXY; PLATINUM; SPUTTER DEPOSITION; STANDARDS; STRUCTURE (COMPOSITION); THICK FILMS; VAPOR DEPOSITION;

FILM GROWTH;

EID: 46449105107 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.2885213 Document Type: Article

Times cited : (6)

References (12)

1
- 0014872452
- J. Hanak, J. Mater. Sci. 5, 964 (1970).
- (1970) J. Mater. Sci. , vol.5 , pp. 964
- Hanak, J.¹

2
- 0032510515
- R. B. van Dover, L. F. Schneemeyer, and R. M. Fleming, Nature (London) 392, 162 (1998).
- (1998) Nature (London) , vol.392 , pp. 162
- Van Dover, R.B.¹ Schneemeyer, L.F.² Fleming, R.M.³

3
- 36549050267
- J. M. Gregoire, M. B. Lobovsky, M. F. Heinz, F. J. DiSalvo, and R. B. van Dover, Phys. Rev. B 76, 195437 (2007).
- (2007) Phys. Rev. B , vol.76 , pp. 195437
- Gregoire, J.M.¹ Lobovsky, M.B.² Heinz, M.F.³ Disalvo, F.J.⁴ Van Dover, R.B.⁵

4
- 0041507470
- D. W. Hoffman, J. Vac. Sci. Technol. A 8, 3707 (1990).
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3707
- Hoffman, D.W.¹

5
- 34547580847
- J. M. Gregoire, R. B. van Dover, J. Jin, F. J. DiSalvo, and H. D. Abrua, Rev. Sci. Instrum. 78, 072212 (2007).
- (2007) Rev. Sci. Instrum. , vol.78 , pp. 072212
- Gregoire, J.M.¹ Van Dover, R.B.² Jin, J.³ Disalvo, F.J.⁴ Abrua, H.D.⁵

6
- 46449135552
- I. W. S. P. Grou
- I. W. S. P. Group, www.iap.tuwien.ac.at/www/surface/script/sputteryield (2006).
- (2006)

7
- 0016569164
- H. Oechsner, Appl. Phys. 8, 185 (1975).
- (1975) Appl. Phys. , vol.8 , pp. 185
- Oechsner, H.¹

8
- 0001129254
- W. Eckstein and J. P. Biersack, Z. Phys. B: Condens. Matter 63, 471 (1986).
- (1986) Z. Phys. B: Condens. Matter , vol.63 , pp. 471
- Eckstein, W.¹ Biersack, J.P.²

9
- 21844506169
- W. Bauer, G. Betz, H. Bangert, A. Bergauer, and C. Eisenmenger-Sittner, J. Vac. Sci. Technol. A 12, 3157 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 3157
- Bauer, W.¹ Betz, G.² Bangert, H.³ Bergauer, A.⁴ Eisenmenger-Sittner, C.⁵

10
- 46449091614
- Institute of Plasma Physics Reports IPPJ-AM-52, (unpublished).
- N. Matsunami, Y. Yamamura, N. Itoh, H. Tawara, and T. Kawamura, Institute of Plasma Physics Reports IPPJ-AM-52, 1987 (unpublished).
- (1987)
- Matsunami, N.¹ Yamamura, Y.² Itoh, N.³ Tawara, H.⁴ Kawamura, T.⁵

11
- 0019236110
- N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, and R. Shimizu, Radiat. Eff. Lett. Sect. 57, 15 (1980).
- (1980) Radiat. Eff. Lett. Sect. , vol.57 , pp. 15
- Matsunami, N.¹ Yamamura, Y.² Itikawa, Y.³ Itoh, N.⁴ Kazumata, Y.⁵ Miyagawa, S.⁶ Morita, K.⁷ Shimizu, R.⁸

12
- 46449104729
- Cornell Fuel Cell Institute.
- Cornell Fuel Cell Institute, www.cfci.ccmr.cornell.edu/resputter.html (2007).
- (2007)

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.