Design and spectroscopic reflectometry characterization of pulsed laser deposition combinatorial libraries

Applied Surface Science

Volumn 254, Issue 3, 2007, Pages 781-784

  Schenck, Peter K ^a   Bassim, Nabil D ^a   Otani, Makoto ^a   Oguchi, Hiroyuki ^b   Green, Martin L ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Combinatorial; Reflectometry; Thin films

Indexed keywords

DISTRIBUTION FUNCTIONS; FILM THICKNESS; REFLECTOMETERS; TERNARY SYSTEMS; THIN FILMS; WAVELENGTH;

COMBINATORIAL LIBRARY FILMS; DEPOSITION PATTERN; SPECTROSCOPIC REFLECTOMETER;

PULSED LASER DEPOSITION;

EID: 36049029038     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.086     Document Type: Article

References (10)

1. Hanak J.J. J. Mater. Sci. 5 (1970) 964
2. Xiang X.D., Sun X., Briceno G., Lou Y., Wang K.-A., Chang H., Wallace-Freedman W.G., Chen S.-W., and Schultz P.G. Science 268 (1995) 1738
3. Christen H.M., Silliman S.D., and Harshavardhan K.S. Rev. Sci. Inst. 72 (2001) 2673
4. Wilk G.D., Wallace R.M., and Anthony J.M. J. Appl. Phys. 89 (2001) 5243
5. Schenck P.K., Kaiser D.K., and Davydov A.V. Appl. Surf. Sci. 223 (2004) 200
6. Palik E.D. Handbook of Optical Constants of Solids (1998), Academic Press, San Diego
7. Heavens O.S. Optical Properties of Thin Solid Films (1991), Dover, New York
8. Saenger K.L. In: Chrisey D.B., and Hubler G.K. (Eds). Pulsed Laser Deposition of Thin Films (1994), Wiley/Interscience 199
9. Schenck P.K., Hastie J.W., Paul A.J., and Bonnell D.W. Opt. Eng. 35 (1996) 3199
10. Young H.D. Statistical Treatment of Experimental Data (1962), McGraw-Hill, New York