A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing

JOM

Volumn 67, Issue 1, 2015, Pages 154-163

  Bunn, J K ^a   Metting, C J ^a   Hattrick Simpers, J ^a  

^a The Department of Mechanical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION RATES; FILM THICKNESS; MAGNETRON SPUTTERING; PETROLEUM PROSPECTING; THIN FILMS;

COMPUTATIONAL MATERIALS; EXPERIMENTAL CONDITIONS; EXPERIMENTAL DEPOSITION; SEMI-EMPIRICAL APPROACH; SEMI-EMPIRICAL MODELING; SPUTTERED THIN FILMS; SPUTTERING DEPOSITION; SYNTHESIS COMPOSITION;

CHIMNEYS;

EID: 84925101523     PISSN: 10474838     EISSN: 15431851     Source Type: Journal    
DOI: 10.1007/s11837-014-1234-2     Document Type: Article

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