Temperature distribution measurement of Au micro-heater in microfluidic channel using IR microscope

International Journal of Precision Engineering and Manufacturing

Volumn 16, Issue 2, 2015, Pages 367-372

  Son, Jung Min ^a   Lee, Jun Hyung ^a   Kim, Jungwoo ^a   Cho, Young Hak ^a  

^a Seoul National University of Science and Technology   (South Korea)

Author keywords

Au micro heater; Infrared (IR) microscope; Sapphire substrate; Temperature distribution measurement

Indexed keywords

ADHESION; COMPUTATIONAL FLUID DYNAMICS; FLUIDIC DEVICES; GOLD METALLOGRAPHY; HEATING EQUIPMENT; MICROFLUIDICS; MICROSCOPES; SAPPHIRE; TEMPERATURE DISTRIBUTION;

ATMOSPHERIC ENVIRONMENT; COMPUTATIONAL FLUID DYNAMICS SIMULATIONS; CONTROL AND MEASUREMENT; MEASURED TEMPERATURES; MICRO-FLUIDIC DEVICES; MICRO-HEATERS; SAPPHIRE SUBSTRATES; TEMPERATURE DISTRIBUTION MEASUREMENT;

ATMOSPHERIC TEMPERATURE;

EID: 84924811187     PISSN: 22347593     EISSN: 20054602     Source Type: Journal    
DOI: 10.1007/s12541-015-0048-7     Document Type: Article

References (12)

1. Chung, G. S., “Fabrication and Characterization of Micro-Heaters with Low-Power Consumption using SOI Membrane and Trench Structures,” Sensors and Actuators A: Physical, Vol. 112, No. 1, pp. 55–60, 2004.
2. Lee, D. W. and Oh, I. K., “Micro/Nano-Heater Integrated Cantilevers for Micro/Nano-Lithography Applications,” Microelectronic Engineering, Vol. 84, No. 5, pp. 1041–1044, 2007.
3. Zhang, K. L., Chou, S. K., and Ang, S. S., “Fabrication, Modeling and Testing of a Thin Film Au/Ti Microheater,” International Journal of Thermal Sciences, Vol. 46, No. 6, pp. 580–588, 2007.
4. Martinez-Quijada, J., Caverhill-Godkewitsch, S., Reynolds, M., Gutierrez-Rivera, L., Johnstone, R., et al., “Fabrication and Characterization of Aluminum Thin Film Heaters and Temperature Sensors on a Photopolymer for Lab-on-Chip Systems,” Sensors and Actuators A: Physical, Vol. 193, pp. 170–181, 2013.
5. Qu, W. and Mudawar, I., “Flow Boiling Heat Transfer in Two-Phase Micro-Channel Heat Sinks-I. Experimental Investigation and Assessment of Correlation Methods,” International Journal of Heat and Mass Transfer, Vol. 46, No. 15, pp. 2755–2771, 2003.
6. Astarita, T., Cardone, G., Carlomagno, G. M., and Meola, C., “A Survey on Infrared Thermography for Convective Heat Transfer Measurements,” Optics & Laser Technology, Vol. 32, No. 7, pp. 593–610, 2000.
7. Köck, H., Košel, V., Djelassi, C., Glavanovics, M., and Pogany, D., “IR Thermography and FEM Simulation Analysis of On-Chip Temperature during Thermal-Cycling Power-Metal Reliability Testing using in Situ Heated Structures,” Microelectronics Reliability, Vol. 49, No. 9, pp. 1132–1136, 2009.
8. Hetsroni, G., Gurevich, M., Mosyak, A., and Rozenblit, R., “Surface Temperature Measurement of a Heated Capillary Tube by Means of an Infrared Technique,” Measurement Science and Technology, Vol. 14, No. 6, pp. 807–814, 2003.
9. Patil, V. A. and Narayanan, V., “Measurement of Near-Wall Liquid Temperatures in Single-Phase Flows through Silicon Microchannels,” Proc. of ASME 3rd International Conference on Microchannels and Minichannels, pp. 343–349, 2005.
10. Hetsroni, G., Mosyak, A., Pogrebnyak, E., and Rozenblit, R., “Infrared Temperature Measurements in Micro-Channels and Micro- Fluid Systems,” International Journal of Thermal Sciences, Vol. 50, No. 6, pp. 853–868, 2011.
11. Zhao, J., Sheadel, D. A., and Xue, W., “Surface Treatment of Polymers for the Fabrication of all-Polymer MEMS Devices,” Sensors and Actuators A: Physical, Vol. 187, pp. 43–49, 2012.
12. Talaei, S., Frey, O., Van Der Wal, P., De Rooij, N., and Koudelka- Hep, M., “Hybrid Microfluidic Cartridge Formed by Irreversible Bonding of SU-8 and PDMS for Multi-Layer Flow Applications,” Procedia Chemistry, Vol. 1, No. 1, pp. 381–384, 2009.