Surface treatment of polymers for the fabrication of all-polymer MEMS devices

Sensors and Actuators, A: Physical

Volumn 187, Issue , 2012, Pages 43-49

  Zhao, Jiheng ^a   Sheadel, Debra A ^a   Xue, Wei ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

All polymer MEMS devices; Heterogeneous bonding; Homogeneous bonding; Microfluidics; Surface treatment

Indexed keywords

3-AMINOPROPYLTRIETHOXYSILANE; BIOMEDICAL APPLICATIONS; FABRICATION PROCESS; HIGH FLEXIBILITY; LOW COSTS; LOW POWER; MEMSDEVICES; MICRO-FLUIDIC DEVICES; OXYGEN PLASMAS; POLYMER MICROELECTROMECHANICAL SYSTEM; SANDWICHED STRUCTURE; SILANE SOLUTIONS; SILANOLS; SILICON DEVICES; SURFACE CHEMISTRY PROPERTIES; UNIFORM COATING;

BIOCOMPATIBILITY; ELECTROMECHANICAL DEVICES; FABRICATION; FUNCTIONAL POLYMERS; HYDROPHILICITY; MEDICAL APPLICATIONS; MEMS; MICROCHANNELS; MICROFLUIDICS; OXYGEN; PLASMAS; PLASTIC COATINGS; SILANES; SILICONES; SURFACE CHEMISTRY;

SURFACE TREATMENT;

EID: 84868529904     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.08.018     Document Type: Article

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