Tunable antireflection from conformal Al-doped ZnO films on nanofaceted Si templates

Nanoscale Research Letters

Volumn 9, Issue 1, 2014, Pages 1-7

  Basu, Tanmoy ^a   Kumar, Mohit ^a   Sahoo, Pratap Kumar ^b   Kanjilal, Aloke ^c   Som, Tapobrata ^a  

^a INSTITUTE OF PHYSICS   (India)

^b NATIONAL INSTITUTE OF SCIENCE EDUCATION AND RESEARCH   (India)

^c SHIV NADAR UNIVERSITY   (India)

Author keywords

Aluminum doped zinc oxide; Antireflection property; Ion beam induced nanopatterning; Silicon; Sputter deposition

Indexed keywords

ALUMINUM COATINGS; INFRARED DEVICES; ION BEAMS; OPTICAL FILMS; REFRACTIVE INDEX; SEMICONDUCTOR DOPING; SILICON; SPUTTER DEPOSITION; ZINC OXIDE;

AL-DOPED ZNO FILMS; ALUMINUM-DOPED ZINC OXIDE; ANTI-REFLECTION; DEPTH DEPENDENTS; NANOPATTERNING; NEAR-INFRARED RANGE; PHOTOVOLTAIC DEVICES; SURFACE REFLECTANCE;

ALUMINUM;

EID: 84923259116     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-9-192     Document Type: Article

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