Nanoscale temperature mapping in operating microelectronic devices

Science

Volumn 347, Issue 6222, 2015, Pages 629-632

  Mecklenburg, Matthew ^a   Hubbard, William A ^b   White, E R ^b   Dhall, Rohan ^c   Cronin, Stephen B ^c   Aloni, Shaul ^d   Regan, B C ^b  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Lawrence Berkeley National Laboratory ^*  (United States)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM;

INSTRUMENTATION; MAPPING; METAL; PHYSICS; RESONANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR INDUSTRY; TEMPERATURE GRADIENT; THERMOREGULATION; TRANSMISSION ELECTRON MICROSCOPY;

ARTICLE; ELECTRON ENERGY LOSS SPECTROSCOPY; HEATING; MEASUREMENT ACCURACY; MOLECULAR ELECTRONICS; NANODEVICE; PLASMON ENERGY EXPANSION THERMOMETRY; PRIORITY JOURNAL; ROOM TEMPERATURE; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SEMICONDUCTOR; THERMOMETER; THERMOMETRY;

EID: 84922384982     PISSN: 00368075     EISSN: 10959203     Source Type: Journal    
DOI: 10.1126/science.aaa2433     Document Type: Article

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