An oblique angle radio frequency sputtering method to fabricate nanoporous hydrophobic TiO2 film

Thin Solid Films

Volumn 568, Issue 1, 2014, Pages 81-86

  Chatterjee, Sriparna ^a,b   Kumar, Mohit ^a   Gohil, Smita ^c   Som, Tapobrata ^a  

^a INSTITUTE OF PHYSICS   (India)

^b CSIR INSTITUTE OF MINERALS AND MATERIALS TECHNOLOGY   (India)

^c TATA INSTITUTE OF FUNDAMENTAL RESEARCH   (India)

Author keywords

Columnar array; Hydrophobic surface; Oblique angle sputter deposition; Thin films; Titanium dioxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; FIELD EMISSION MICROSCOPES; HYDROPHOBICITY; POROSITY; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SPUTTERING; SURFACE CHEMISTRY; THIN FILMS; TITANIUM DIOXIDE; ULTRAVIOLET VISIBLE SPECTROSCOPY; X RAY DIFFRACTION;

COLUMNAR ARRAYS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GLANCING ANGLE SPUTTER DEPOSITIONS; HYDROPHOBIC SURFACES; LINEAR RELATIONSHIPS; OBLIQUE ANGLES; RADIO FREQUENCY SPUTTER; RADIO FREQUENCY SPUTTERING METHOD;

DEPOSITION;

EID: 84920287416     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2014.08.005     Document Type: Article

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