Compact silicon nitride arrayed waveguide gratings for very near-infrared wavelengths

IEEE Photonics Technology Letters

Volumn 27, Issue 2, 2015, Pages 137-140

  Martens, Daan ^a   Subramanian, Ananth Z ^a   Pathak, Shibnath ^a   Vanslembrouck, Michael ^a   Bienstman, Peter ^a   Bogaerts, Wim ^a,b   Baets, Roel G ^a  

^a GHENT UNIVERSITY   (Belgium)

^b Luceda Photonics   (Belgium)

Author keywords

Arrayed Waveguide Grating; High index contrast; Near infrared; Silicon Nitride

Indexed keywords

CMOS INTEGRATED CIRCUITS; FABRICATION; INFRARED DEVICES; METALS; MOS DEVICES; NITRIDES; OPTICAL WAVEGUIDES; OXIDE SEMICONDUCTORS; SILICON; SILICON NITRIDE; WAVEFORM ANALYSIS; WAVEGUIDES;

CENTRAL CHANNELS; CHANNEL SPACINGS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; HIGH INDEX CONTRAST; MASS FABRICATION; NEAR INFRARED; NEAR-INFRARED WAVELENGTH; ON-CHIP APPLICATIONS;

ARRAYED WAVEGUIDE GRATINGS;

EID: 84919788174     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2014.2363298     Document Type: Article

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