Low-Loss Singlemode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line

IEEE Photonics Journal

Volumn 5, Issue 6, 2013, Pages

  Subramanian, A Z ^a   Neutens, P ^b   Dhakal, A ^a   Jansen, R ^b   Claes, T ^b   Rottenberg, X ^b   Peyskens, F ^a   Selvaraja, S ^a,b   Helin, P ^b   Dubois, B ^b   Leyssens, K ^b   Severi, S ^b   Deshpande, P ^b   Baets, R ^a   Van Dorpe, P ^b  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

fabrication and characterization; gratings; photonic materials; waveguide devices; Waveguides

Indexed keywords

FABRICATION AND CHARACTERIZATIONS; PECVD SILICON NITRIDE; PHOTONIC MATERIALS; PHOTONIC WIRE WAVEGUIDES; SINGLE MODE WAVEGUIDES; WAVEGUIDE DEVICE; WAVELENGTH RANGES; WIRE WAVE GUIDES;

DIFFRACTION GRATINGS; ELECTRIC LOSSES; FABRICATION; SILICON NITRIDE; WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 84890518041     PISSN: 19430655     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOT.2013.2292698     Document Type: Article

References (16)

1. X. Fan and I. M. White, BOptofluidic microsystems for chemical and biological analysis,[ Nat. Photon., vol. 5, no. 10, pp. 591-597, Oct. 2011.
2. A. L. Washburn and R. C. Bailey, BPhotonics-on-a-chip: Recent advances in integrated waveguides as enabling detection elements for real world, lab-on-a-chip biosensing applications,[ Analyst, vol. 136, no. 2, pp. 227-236, Jan. 2011.
3. C. L. Arce, D. Witters, R. Puers, J. Lammertyn, and P. Bienstman, BSilicon photonic sensors incorporated in a digital microfluidic system,[ Analytical Bioanalytical Chem., vol. 404, no. 10, pp. 2887-2894, Dec. 2012.
4. S. Kuhn, P. Measor, E. J. Lunt, B. S. Philips, D. W. Deamer, A. R. Hawkins, and H. Schmidt, BLoss-based optical trap for on-chip particle analysis,[ Lab Chip, vol. 9, no. 15, pp. 2212-2216, Aug. 2009.
5. P. C. Ashok, G. P. Singh, H. A. Rendall, T. F. Krauss, and K. Dholakia, BWaveguide confined Raman spectroscopy for microfluidic interrogation,[ Lab Chip, vol. 11, no. 7, pp. 1262-1272, Apr. 2011.
6. F. Prieto, B. Sepú lveda, A. Calle, A. Llobera, C. Doḿnguez, A. Abad, A. Montoya, and L. M. Lechuga, BAn integrated optical interferometric nanodevice based on silicon technology for biosensor applications,[ Nanotechnology, vol. 14, no. 8, pp. 907-912, Aug. 2003.
7. N. Daldosso, M. Melchiorri, F. Riboli, M. Girardini, G. Pucker, M. Crivellari, A. Lui, and L. Pavesi, BComaprison among various Si3N4 waveguide geometries grown within a CMOS fabrication pilot line,[ J. Lightw. Technol., vol. 22, no. 7, pp. 1734-1740, Jul. 2004.
8. I. Goykhman, B. Desiatov, and U. Levy, BUltrathin silicon nitride microring resonator for bio-photonic applications at 970 nm wavelength,[ Appl. Phys. Lett., vol. 97, no. 8, pp. 081108-1-081108-3, Aug. 2010.
9. A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, BFabrication of silicon nitride waveguides for visible-light using PECVD: A study of the effect of plasma frequency on optical properties,[ Opt. Exp., vol. 16, no. 8, pp. 13 509-13 516, Sep. 2008.
10. S. Romero-Garcia, F. Merget, F. Zhong, H. Finkelstein, and J. Witzens, BSilicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths,[ Opt. Exp., vol. 21, no. 12, pp. 14 036-14 046, Jun. 2013.
11. P. Bienstman and R. Baets, BOptical modeling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers,[ Opt. Quant. Electron., vol. 33, no. 4/5, pp. 327-341, Apr. 2001.
12. D. Taillaert, P. Bienstman, and R. Baets, BCompact efficient broadband grating coupler for silicon-on-insulator waveguides,[ Opt. Lett., vol. 29, no. 23, pp. 2749-2751, Dec. 2004.
13. A. Z. Subramanian, S. Selvaraja, P. Verheyen, A. Dhakal, K. Komorowska, and R. Baets, BNear-infrared grating couplers for silicon nitride photonic wires,[ Photon. Technol. Lett., vol. 24, no. 19, pp. 1700-1703, Oct. 2012.
14. G. Roelkens, D. Vermeulen, S. Selvaraja, R. Halir, W. Bogaerts, and D. Van Thourhout, BGrating based optical fiber interfaces for silicon-on-insulator photonic integrated circuits,[ IEEE J. Sel. Top. Quant. Electron., vol. 17, no. 3, pp. 571-580, May/Jun. 2011.
15. S. Romero-Garcia, F. Merget, F. Zhong, H. Finkelstein, and J. Witzens, BVisible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector,[ Opt. Lett., vol. 38, no. 14, pp. 2521-2523, Jun. 2013.
16. W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, BCost effective CMOS compatible grating couplers with backside metal mirror and 69% coupling efficiency,[ Opt. Exp., vol. 20, no. 26, pp. B238-B243, Dec. 2012.