A comparative study on material selection of microelectromechanical systems electrostatic actuators using Ashby, VIKOR and TOPSIS

Materials and Design

Volumn 65, Issue , 2015, Pages 328-334

  Yazdani, Morteza ^a   Payam, Amir Farokh ^b  

^a UNIVERSIDAD EUROPEA DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DECISION MAKING; ELECTRIC CONDUCTIVITY; ELECTROSTATICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; POLYMETHYL METHACRYLATES; SILICON CARBIDE;

APPROPRIATE MATERIALS; LOW ACTUATION VOLTAGE; MEMS ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MULTI OBJECTIVE DECISION MAKING; MULTIPLE ATTRIBUTE DECISION MAKING; POLYVINYLIDENE FLUORIDES; TECHNIQUE FOR ORDER PREFERENCE BY SIMILARITY TO IDEAL SOLUTIONS;

ELECTROSTATIC ACTUATORS;

EID: 84918591667     PISSN: 02613069     EISSN: 18734197     Source Type: Journal    
DOI: 10.1016/j.matdes.2014.09.004     Document Type: Article

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