Material selection for MEMS devices

Indian Journal of Pure and Applied Physics

Volumn 45, Issue 4, 2007, Pages 358-367

  Pratap, Rudra ^a   Arunkumar, A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Material performance indices; MEMS devices; MEMS gyroscope; MEMS ultrasound transducer; Thermoelastic damping

Indexed keywords

EID: 34547977460     PISSN: 00195596     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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