Materials selection in mechanical design for microsensors and microactuators

Materials and Design

Volumn 23, Issue 7, 2002, Pages 619-625

  Qian, Jin ^a   Zhao, Ya Pu ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

Materials selection; Mechanical design; Microactuators; Microelectromechanical systems; Microsensors; Performance index

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; LOGIC DESIGN; MICROACTUATORS; MICROSENSORS;

PERFORMANCE INDEX;

MICROELECTROMECHANICAL DEVICES;

CONTROL SYSTEM; DESIGN; MECHANICAL PROPERTY; SENSOR; STRUCTURAL ANALYSIS;

EID: 0036818767     PISSN: 02641275     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. Materials issue in microelectromechanical systems (MEMS)
2. Silicon carbide MEMS for harsh environments integrated sensors
3. Diamond and amorphous carbon MEMS
4. LIGA technologies and applications
5. Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nanotubes
6. Kovacs
7. VHF free-free beam high-Q micromechanical resonators
8. Carbon nanotubes actuators
9. Exceptionally high Young's modulus observed for individual carbon nanotubes
10. Microcantilever sensors
11. IC-processed electrostatic micromotors
12. Modeling of the martensitie transformation in shape memory alloy composites
13. Thermomechanical aspects of NiTi
14. The selection of mechanical actuators based on performance indices