A parametric study of non-thermal plasma synthesis of silicon nanoparticles from a chlorinated precursor

Journal of Physics D: Applied Physics

Volumn 47, Issue 48, 2014, Pages

  Ding, Yi ^a   Yamada, Riku ^a   Gresback, Ryan ^a   Zhou, Shu ^a,b   Pi, Xiaodong ^b   Nozaki, Tomohiro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

crystallinity; hydrogen chloride; non thermal plasma; silicon nanocrystals; silicon tetrachloride

Indexed keywords

AMORPHOUS MATERIALS; CHLORINE COMPOUNDS; DECHLORINATION; FILM GROWTH; FLOW OF GASES; MASS SPECTROMETRY; NANOPARTICLES; SEEBECK EFFECT; SILICON; SYNTHESIS (CHEMICAL);

CRYSTALLINITIES; HYDROGEN CHLORIDE; NONTHERMAL PLASMA; SILICON NANOCRYSTALS; SILICON TETRACHLORIDE;

AMORPHOUS SILICON;

EID: 84910677264     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/47/48/485202     Document Type: Article

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