A novel vertical DMOS transistor in SOA technology for RF-power applications

2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings

Volumn 1, Issue , 2002, Pages 159-162

  Nenadovic N ^a   Cuoco, V ^a   Theeuwen, S J C H ^b   Nanver, L K ^a   Jos, H F F ^b   Slotboom, J W ^a,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER; MICROELECTRONICS; SERVICE ORIENTED ARCHITECTURE (SOA);

COPPER ELECTROPLATING; DEVICE PERFORMANCE; GATE OXIDE DEGRADATION; HIGH-FREQUENCY APPLICATIONS; HOT CARRIER GENERATION; MEDICI SIMULATIONS; RF POWER APPLICATIONS; VERTICAL DMOS TRANSISTORS;

SILICON WAFERS;

EID: 84906655557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2002.1003164     Document Type: Conference Paper

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