SCOPUS 정보 검색 플랫폼

Volumn 24, Issue 28, 2014, Pages 4427-4434

Dissolution behaviors and applications of silicon oxides and nitrides in transient electronics

(8) Kang, Seung Kyun a Hwang, Suk Won a Cheng, Huanyu b Yu, Sooyoun c Kim, Bong Hoon a Kim, Jae Hwan a Huang, Yonggang b Rogers, John A c

a University of Illinois at Urbana Champaign (United States)

b NORTHWESTERN UNIVERSITY (United States)

c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

biodegradable; encapsulation; silicon nitrides; silicon oxides; transient electronics

Indexed keywords

DISSOLUTION; ENCAPSULATION; ENVIRONMENTAL TECHNOLOGY; HYDROLYSIS; SILICON NITRIDE; THERMOELECTRIC EQUIPMENT; THIN FILMS;

BIODEGRADABLE; BIOMEDICAL IMPLANTS; DISSOLUTION BEHAVIOR; ENCAPSULATION LAYER; ENVIRONMENTAL SENSOR; IONIC CONCENTRATIONS; TRANSIENT BEHAVIOR; TRANSIENT ELECTRONICS;

SILICON OXIDES;

EID: 84904667227 PISSN: 1616301X EISSN: 16163028 Source Type: Journal
DOI: 10.1002/adfm.201304293 Document Type: Article

Times cited : (215)

References (34)

1
- 0035339020
- J. A. Babcock, S. G. Balster, A. Pinto, C. Dirnecker, P. Steinmann, R. Jumpertz, B. El-Kareh, IEEE Electron Device Lett. 2001, 22, 230.
- (2001) IEEE Electron Device Lett. , vol.22 , pp. 230
- Babcock, J.A.¹ Balster, S.G.² Pinto, A.³ Dirnecker, C.⁴ Steinmann, P.⁵ Jumpertz, R.⁶ El-Kareh, B.⁷

2
- 10844282779
- J. Robertson, Eur. Phys. J. Appl. Phys. 2004, 28, 265.
- (2004) Eur. Phys. J. Appl. Phys. , vol.28 , pp. 265
- Robertson, J.¹

3
- 27544463653
- Springer, Berlin, Heidelberg
- A. Hierlemann, Integrated Chemical Microsensor Systems in CMOS Technology, Springer, Berlin, Heidelberg 2005.
- (2005) Integrated Chemical Microsensor Systems in CMOS Technology
- Hierlemann, A.¹

4
- 84904615435
- in, Shanghai, China
- R. Sang, H. Zhang, L. Long, Z. Hua, J. Yu, B. Wei, X. Wu, T. Feng, J. Zhang, in Int. Conf. Electronic Packaging Technology & High Density Packaging, Shanghai, China 2011.
- (2011) Int. Conf. Electronic Packaging Technology & High Density Packaging
- Sang, R.¹ Zhang, H.² Long, L.³ Hua, Z.⁴ Yu, J.⁵ Wei, B.⁶ Wu, X.⁷ Feng, T.⁸ Zhang, J.⁹

5
- 84892760979
- Y.-C. Lin, Q.-K. Le, L.-W. Lai, R.-M. Liao, M.-S. Jeng, D.-S. Liu, Int. J. Eng. Tech. Innovation 2012, 2, 184.
- (2012) Int. J. Eng. Tech. Innovation , vol.2 , pp. 184
- Lin, Y.-C.¹ Le, Q.-K.² Lai, L.-W.³ Liao, R.-M.⁴ Jeng, M.-S.⁵ Liu, D.-S.⁶

6
- 70349671461
- D.-H. Kim, Y.-S. Kim, J. Amsden, B. Panilaitis, D. L. Kaplan, F. G. Omenetto, M. R. Zakin, J. A. Rogers, Appl. Phys. Lett. 2009, 95, 133701.
- (2009) Appl. Phys. Lett. , vol.95 , pp. 133701
- Kim, D.-H.¹ Kim, Y.-S.² Amsden, J.³ Panilaitis, B.⁴ Kaplan, D.L.⁵ Omenetto, F.G.⁶ Zakin, M.R.⁷ Rogers, J.A.⁸

7
- 77954581072
- D.-H. Kim, J. Viventi, J. Amsden, J. Xiao, L. Vigeland, Y.-S. Kim, J. A. Blanco, B. Panilaitis, E. S. Frechette, D. Contreras, D. L. Kaplan, F. G. Omenetto, Y. Huang, K.-C. Hwang, M. R. Zakin, B. Litt, J. A. Rogers, Nat. Mater. 2010, 9, 511.
- (2010) Nat. Mater. , vol.9 , pp. 511
- Kim, D.-H.¹ Viventi, J.² Amsden, J.³ Xiao, J.⁴ Vigeland, L.⁵ Kim, Y.-S.⁶ Blanco, J.A.⁷ Panilaitis, B.⁸ Frechette, E.S.⁹ Contreras, D.¹⁰ Kaplan, D.L.¹¹ Omenetto, F.G.¹² Huang, Y.¹³ Hwang, K.-C.¹⁴ Zakin, M.R.¹⁵ Litt, B.¹⁶ Rogers, J.A.¹⁷

8
- 56649120581
- C. Legnani, C. Vilani, V. L. Calil, H. S. Barud, W. G. Quirino, C. A. Achete, S. J. L. Ribeiro, M. Cremona, Thin Solid Films 2008, 517, 1016.
- (2008) Thin Solid Films , vol.517 , pp. 1016
- Legnani, C.¹ Vilani, C.² Calil, V.L.³ Barud, H.S.⁴ Quirino, W.G.⁵ Achete, C.A.⁶ Ribeiro, S.J.L.⁷ Cremona, M.⁸

9
- 78650164953
- M. Irimia-Vladu, P. A. Troshin, M. Reisinger, L. Shmygleva, Y. Kanbur, G. Schwabegger, M. Bodea, R. Schwödiauer, A. Mumyatov, J. W. Fergus, V. F. Razumov, H. Sitter, N. S. Sariciftci, S. Bauer, Adv. Funct. Mater. 2010, 20, 4069.
- (2010) Adv. Funct. Mater. , vol.20 , pp. 4069
- Irimia-Vladu, M.¹ Troshin, P.A.² Reisinger, M.³ Shmygleva, L.⁴ Kanbur, Y.⁵ Schwabegger, G.⁶ Bodea, M.⁷ Schwödiauer, R.⁸ Mumyatov, A.⁹ Fergus, J.W.¹⁰ Razumov, V.F.¹¹ Sitter, H.¹² Sariciftci, N.S.¹³ Bauer, S.¹⁴

10
- 77049094502
- C. J. Bettinger, Z. Bao, Adv. Mater. 2010, 22, 651.
- (2010) Adv. Mater. , vol.22 , pp. 651
- Bettinger, C.J.¹ Bao, Z.²

11
- 84866753558
- S.-W. Hwang, H. Tao, D.-H. Kim, H. Cheng, J.-K. Song, E. Rill, M. A. Brenckle, B. Panilaitis, S. M. Won, Y.-S. Kim, Y. M. Song, K. J. Yu, A. Ameen, R. Li, Y. Su, M. Yang, D. L. Kaplan, M. R. Zakin, M. J. Slepian, Y. Huang, F. G. Omenetto, J. A. Rogers, Science 2012, 337, 1640.
- (2012) Science , vol.337 , pp. 1640
- Hwang, S.-W.¹ Tao, H.² Kim, D.-H.³ Cheng, H.⁴ Song, J.-K.⁵ Rill, E.⁶ Brenckle, M.A.⁷ Panilaitis, B.⁸ Won, S.M.⁹ Kim, Y.-S.¹⁰ Song, Y.M.¹¹ Yu, K.J.¹² Ameen, A.¹³ Li, R.¹⁴ Su, Y.¹⁵ Yang, M.¹⁶ Kaplan, D.L.¹⁷ Zakin, M.R.¹⁸ Slepian, M.J.¹⁹ Huang, Y.²⁰ Omenetto, F.G.²¹ Rogers, J.A.²² more..

12
- 84883563858
- S.-W. Hwang, D.-H. Kim, H. Tao, T.-I. Kim, S. Kim, K. J. Yu, B. Panilaitis, J.-W. Jeong, J.-K. Song, F. G. Omenetto, J. A. Rogers, Adv. Funct. Mater. 2013, 23, 4087.
- (2013) Adv. Funct. Mater. , vol.23 , pp. 4087
- Hwang, S.-W.¹ Kim, D.-H.² Tao, H.³ Kim, T.-I.⁴ Kim, S.⁵ Yu, K.J.⁶ Panilaitis, B.⁷ Jeong, J.-W.⁸ Song, J.-K.⁹ Omenetto, F.G.¹⁰ Rogers, J.A.¹¹

13
- 84879977156
- S.-W. Hwang, X. Huang, J.-H. Seo, J.-K. Song, S. Kim, S. Hage-Ali, H.-J. Chung, H. Tao, F. G. Omenetto, Z. Ma, J. A. Rogers, Adv. Mater. 2013, 25, 3526.
- (2013) Adv. Mater. , vol.25 , pp. 3526
- Hwang, S.-W.¹ Huang, X.² Seo, J.-H.³ Song, J.-K.⁴ Kim, S.⁵ Hage-Ali, S.⁶ Chung, H.-J.⁷ Tao, H.⁸ Omenetto, F.G.⁹ Ma, Z.¹⁰ Rogers, J.A.¹¹

14
- 84885970958
- C. Dagdeviren, S.-W. Hwang, Y. Su, S. Kim, H. Cheng, O. Gur, R. Haney, F. G. Omenetto, Y. Huang, J. A. Rogers, Small 2013, 9, 3398.
- (2013) Small , vol.9 , pp. 3398
- Dagdeviren, C.¹ Hwang, S.-W.² Su, Y.³ Kim, S.⁴ Cheng, H.⁵ Gur, O.⁶ Haney, R.⁷ Omenetto, F.G.⁸ Huang, Y.⁹ Rogers, J.A.¹⁰

15
- 0023815548
- K. G. Knauss, T. J. Wolery, Geochimica et Cosmochim. Acta 1988, 52, 43.
- (1988) Geochimica et Cosmochim. Acta , vol.52 , pp. 43
- Knauss, K.G.¹ Wolery, T.J.²

16
- 0001208940
- W. A. House, L. A. Hickinbotham, J. Chem. Soc. Faraday Trans. 1992, 88, 2021.
- (1992) J. Chem. Soc. Faraday Trans. , vol.88 , pp. 2021
- House, W.A.¹ Hickinbotham, L.A.²

17
- 84879197404
- Ph. D. thesis, Massachusetts Institute of Technology, USA
- W. G. Worley, Dissolution kinetics and mechanisms in quartz- and grainite-water systems, Ph. D. thesis, Massachusetts Institute of Technology, USA 1994.
- (1994) Dissolution Kinetics and Mechanisms in Quartz- And Grainite-water Systems
- Worley, W.G.¹

18
- 0025521074
- H. Seidel, L. Csepregi, A. Heuberger, H. Baumgärtel, J. Electrochem. Soc. 1990, 137, 3612.
- (1990) J. Electrochem. Soc. , vol.137 , pp. 3612
- Seidel, H.¹ Csepregi, L.² Heuberger, A.³ Baumgärtel, H.⁴

19
- 84895057255
- L. Yin, H. Cheng, S. Mao, R. Haasch, Y. Liu, X. Xie, S.-W. Hwang, H. Jain, S.-K. Kang, Y. Su, R. Li, Y. Huang, J. A. Rogers, Adv. Funct. Mater. 2014, 24, 645.
- (2014) Adv. Funct. Mater. , vol.24 , pp. 645
- Yin, L.¹ Cheng, H.² Mao, S.³ Haasch, R.⁴ Liu, Y.⁵ Xie, X.⁶ Hwang, S.-W.⁷ Jain, H.⁸ Kang, S.-K.⁹ Su, Y.¹⁰ Li, R.¹¹ Huang, Y.¹² Rogers, J.A.¹³

20
- 0034474697
- J. P. Icenhower, P. M. Dove, Geochim. Cosmochim. Acta 2000, 64, 4193.
- (2000) Geochim. Cosmochim. Acta , vol.64 , pp. 4193
- Icenhower, J.P.¹ Dove, P.M.²

21
- 0031414283
- P. M. Dove, C. J. Nix, Geochim. Cosmochim. Acta 1997, 61, 3329.
- (1997) Geochim. Cosmochim. Acta , vol.61 , pp. 3329
- Dove, P.M.¹ Nix, C.J.²

22
- 0033367539
- P. M. Dove, Geochim. Cosmochim. Acta 1999, 63, 3715.
- (1999) Geochim. Cosmochim. Acta , vol.63 , pp. 3715
- Dove, P.M.¹

23
- 0003585771
- Prentice Hall, NJ
- R. C. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, NJ 2001.
- (2001) Introduction to Microelectronic Fabrication
- Jaeger, R.C.¹

24
- 0029323090
- M. F. Ceiler, P. A. Kohl, S. A. Bidstrup, J. Electrochem. Soc. 1995, 142, 2067.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2067
- Ceiler, M.F.¹ Kohl, P.A.² Bidstrup, S.A.³

25
- 84904698295
- D. S. Allam, K. E. G. Pitt, Thin Solid Films 1967, 68, 245.
- (1967) Thin Solid Films , vol.68 , pp. 245
- Allam, D.S.¹ Pitt, K.E.G.²

26
- 84879207062
- R. Li, H. Cheng, Y. Su, S.-W. Hwang, L. Yin, H. Tao, M. A. Brenckle, D.-H. Kim, F. G. Omenetto, J. A. Rogers, Y. Huang, Adv. Funct. Mater. 2013, 23, 3106.
- (2013) Adv. Funct. Mater. , vol.23 , pp. 3106
- Li, R.¹ Cheng, H.² Su, Y.³ Hwang, S.-W.⁴ Yin, L.⁵ Tao, H.⁶ Brenckle, M.A.⁷ Kim, D.-H.⁸ Omenetto, F.G.⁹ Rogers, J.A.¹⁰ Huang, Y.¹¹

27
- 0000051790
- L. Bergstrom, E. Bostedt, Colloid Surf. A 1990, 49, 183.
- (1990) Colloid Surf. A , vol.49 , pp. 183
- Bergstrom, L.¹ Bostedt, E.²

28
- 0033569764
- B. V. Zhmud, L. Bergstrom, J. Colloid Interface Sci. 1999, 218, 582.
- (1999) J. Colloid Interface Sci. , vol.218 , pp. 582
- Zhmud, B.V.¹ Bergstrom, L.²

29
- 0034301238
- E. Laarz, B. V. Zhmud, L. Bergstrom, J. Am. Ceram. Soc. 2000, 83, 2394.
- (2000) J. Am. Ceram. Soc. , vol.83 , pp. 2394
- Laarz, E.¹ Zhmud, B.V.² Bergstrom, L.³

30
- 33747821068
- F. J. H. van Assche, R. T. Vangheluwe, J. W. C. Maes, W. S. Mischke, M. D. Bijker, F. C. Dings, M. F. J. Evers, SID 04 Digest of Technical Papers 2004, 695.
- (2004) SID 04 Digest of Technical Papers , pp. 695
- Van Assche, F.J.H.¹ Vangheluwe, R.T.² Maes, J.W.C.³ Mischke, W.S.⁴ Bijker, M.D.⁵ Dings, F.C.⁶ Evers, M.F.J.⁷

31
- 32244447935
- J. J. W. M. Rosink, H. Lifka, G. H. Rietjens, A. Pierik, SID 05 Digest of Technical Papers 2005, 1272.
- (2005) SID 05 Digest of Technical Papers , pp. 1272
- Rosink, J.J.W.M.¹ Lifka, H.² Rietjens, G.H.³ Pierik, A.⁴

32
- 47049095504
- A. A. Dameron, S. D. Davidson, B. B. Burton, P. F. Carcia, R. S. McLean, S. M. George, J. Phys. Chem. C 2008, 112, 4573.
- (2008) J. Phys. Chem. C , vol.112 , pp. 4573
- Dameron, A.A.¹ Davidson, S.D.² Burton, B.B.³ Carcia, P.F.⁴ McLean, R.S.⁵ George, S.M.⁶

33
- 66749120161
- J. Meyer, P. Gorrn, F. Bertram, S. Hamwi, T. Winkler, H.-H. Johannes, T. Weimann, P. Hinze, T. Riedl, W. Kowalsky, Adv. Mater. 2009, 21, 1845.
- (2009) Adv. Mater. , vol.21 , pp. 1845
- Meyer, J.¹ Gorrn, P.² Bertram, F.³ Hamwi, S.⁴ Winkler, T.⁵ Johannes, H.-H.⁶ Weimann, T.⁷ Hinze, P.⁸ Riedl, T.⁹ Kowalsky, W.¹⁰

34
- 84887200629
- S. Park, W. M. Yun, L. H. Kim, S. Park, S. H. Kim, C. E. Park, Org. Electron. 2013, 14, 3385.
- (2013) Org. Electron. , vol.14 , pp. 3385
- Park, S.¹ Yun, W.M.² Kim, L.H.³ Park, S.⁴ Kim, S.H.⁵ Park, C.E.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.