Nanoimprinting techniques for large-area three-dimensional negative index metamaterials with operation in the visible and telecom bands

ACS Nano

Volumn 8, Issue 6, 2014, Pages 5535-5542

  Gao, Li ^b   Shigeta, Kazuki ^b   Vazquez Guardado, Abraham ^a   Progler, Christopher J ^c   Bogart, Gregory R ^d   Rogers, John A ^b   Chanda, Debashis ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c PHOTRONICS INC   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

metamaterials; nanoimprint lithography; negative index

Indexed keywords

NANOIMPRINT LITHOGRAPHY; REFRACTIVE INDEX;

COMPUTATIONAL ANALYSIS; NEGATIVE INDEX; NEGATIVE INDEX METAMATERIAL; NEGATIVE INDEX OF REFRACTION; REFLECTION AND TRANSMISSION; SPATIAL UNIFORMITY; TELECOMMUNICATION BANDS; VISIBLE-WAVELENGTH RANGE;

METAMATERIALS;

EID: 84903449501     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn5015775     Document Type: Article

References (28)

1. Shelby, R. A.; Smith, D. R.; Schultz, S. Experimental Verification of a Negative Index of Refraction Science 2001, 292, 77-79 (Pubitemid 32289127)
2. Schurig, D.; Mock, J. J.; Justice, B. J.; Cummer, S. A.; Pendry, J. B.; Starr, A. F.; Smith, D. R. Metamaterial Electromagnetic Cloak at Microwave Frequencies Science 2006, 314, 977-980 (Pubitemid 44749939)
3. Yen, T. J.; Padilla, W. J.; Fang, N.; Vier, D. C.; Smith, D. R.; Pendry, J. B.; Basov, D. N.; Zhang, X. Terahertz Magnetic Response from Artificial Materials Science 2004, 303, 1494-1496 (Pubitemid 38314413)
4. Paul, O.; Imhof, C.; Reinhard, B.; Zengerle, R.; Beigang, R. Negative Index Bulk Metamaterial at Terahertz Frequencies Opt. Express 2008, 16, 6736-6744 (Pubitemid 351637522)
5. Dolling, G.; Enkrich, C.; Wegener, M. Low-Loss Negative-Index Metamaterial at Telecommunication Wavelengths Opt. Lett. 2006, 31, 1800-1802 (Pubitemid 44048908)
6. Zhang, S.; Fan, W.; Panoiu, N. C.; Malloy, K. J.; Osgood, R. M.; Brueck, S. R. Optical Negative-Index Bulk Metamaterials Consisting of 2D Perforated Metal-Dielectric Stacks Opt. Express 2006, 14, 6778-6787 (Pubitemid 44118116)
7. Shalaev, V. M. Optical Negative-Index Metamaterials Nat. Photonics 2007, 1, 47
8. Soukoulis, C. M.; Linden, S.; Wegener, M. Negative Refractive Index at Optical Frequencies Science 2007, 315, 47-49 (Pubitemid 46196966)
9. Chanda, D.; Shigeta, K.; Gupta, S.; Cain, T.; Carlson, A.; Mihi, A.; Baca, A. J.; Bogart, G. R.; Braun, P. V.; Rogers, J. A. Large-Area Flexible 3D Optical Negative Index Metamaterial Formed by Nanotransfer Printing Nat. Nanotechnol. 2011, 6, 402-407
10. Zhang, S.; Fan, W.; Malloy, K. J.; Brueck, S. R. J.; Panoiu, N. C.; Osgood, R. M. Near-Infrared Double Negative Metamaterials Opt. Express 2005, 13, 4922-4930 (Pubitemid 41029329)
11. Valentine, J.; Zhang, S.; Zentgraf, T.; Ulin-Avila, E.; Genov, D. A.; Bartal, G.; Zhang, X. Three-Dimensional Optical Metamaterial with a Negative Refractive Index Nature 2008, 455, 376-380
12. Garcia-Meca, C.; Hurtado, J.; Marti, J.; Martinez, A. Low-Loss Multilayered Metamaterial Exhibiting a Negative Index of Refraction at Visible Wavelengths Phys. Rev. Lett. 2011, 106, 067402
13. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Nanoimprint Lithography J. Vac. Sci. Technol., B 1996, 14, 4129-4133 (Pubitemid 126582846)
14. Xia, Y.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M. Unconventional Methods for Fabricating and Patterning Nanostructures Chem. Rev. 1999, 99, 1823-1848 (Pubitemid 129585162)
15. Gates, B. D.; Xu, Q.; Love, J. C.; Wolfe, D. B.; Whitesides, G. M. Unconventional Nanofabrication Annu. Rev. Mater. Res. 2004, 34, 339-372
16. Dolling, G.; Wegener, M.; Linden, S. Realization of a Three-Functional-Layer Negative-Index Photonic Metamaterial Opt. Lett. 2007, 32, 551-553 (Pubitemid 46363523)
17. Wu, W.; Kim, E.; Ponizovskaya, E.; Liu, Z.; Yu, Z.; Fang, N.; Shen, Y. R.; Bratkovsky, A. M.; Tong, W.; Sun, C. et al. Optical Metamaterials at Near and Mid-IR Range Fabricated by Nanoimprint Lithography Appl. Phys. A: Mater. Sci. Process. 2007, 87, 143-150 (Pubitemid 46418156)
18. Bailey, T.; Choi, B. J.; Colburn, M.; Meissl, M.; Shaya, S.; Ekerdt, J. G.; Sreenivasan, S. V.; Willson, C. G. Step and Flash Imprint Lithography: Template Surface Treatment and Defect Analysis J. Vac. Sci. Technol., B 2000, 18, 3572
19. Hua, F.; Sun, Y.; Gaur, A.; Meitl, M.; Bilhaut, L.; Rotkina, L.; Wang, J.; Geil, P.; Shim, M.; Rogers, J. A. Polymer Imprint Lithography with Molecular-Scale Resolution Nano Lett. 2004, 4, 2467-2471 (Pubitemid 40002386)
20. Hua, F.; Gaur, A.; Sun, Y.; Word, M.; Niu, J.; Adesida, I.; Shim, M.; Rogers, J. A. Processing Dependent Behavior of Soft Imprint Lithography on the 1-10 nm Scale IEEE Trans. Nanotechnol. 2006, 5, 301-308
21. n Treated Surface Effect and Its Correlation with Adhesion Reduction in Microvalves J. Micromech. Microeng. 2009, 19, 085017
22. Hill, D. N.; Lee, J. D.; Cochran, J. K.; Chapman, A. T. Vapour Deposited Cone Formation during Fabrication of Low Voltage Field Emitter Array Cathodes J. Mater. Sci. 1996, 31, 1789-1796 (Pubitemid 126711543)
23. Lee, H.; Park, Y.; Kim, J.; Choi, J.; Kim, J. Investigation of the Formation Mechanism of Spindt-Type Cathode by Simulation and Experiments J. Vac. Sci. Technol., B 1999, 17, 547-551 (Pubitemid 129721215)
24. Smith, D. R.; Schultz, S.; Markos, P.; Soukoulis, C. M. Determination of Effective Permittivity and Permeability of Metamaterials from Reflection and Transmission Coefficients Phys. Rev. B 2002, 65, 195104
25. Chen, X.; Grzegorczyk, T. M.; Wu, B.; Pacheco, J. J.; Kong, J. A. Robust Method To Retrieve the Constitutive Effective Parameters of Metamaterials Phys. Rev. E 2004, 70, 016608
26. Smith, D. R.; Vier, D. C.; Koschny, T.; Soukoulis, C. M. Electromagnetic Parameter Retrieval from Inhomogeneous Metamaterials Phys. Rev. E 2005, 71, 036617
27. Maas, R.; Parsons, J.; Engheta, N.; Polman, A. Experimental Realization of an Epsilon-Near-Zero Metamaterial at Visible Wavelengths Nat. Photonics 2013, 7, 907-912
28. Burgos, S. P.; deWaele, R.; Polman, A.; Atwater, H. A. A Single-Layer Wide-Angle Negative-Index Metamaterial at Visible Frequencies Nat. Mater. 2010, 7, 407-412