Preparation of non-spherical particles by shell-shield etching for near-field nanopatterning

Nanotechnology

Volumn 25, Issue 27, 2014, Pages

  Ye, Jian ^a   Liesbet, Lagae ^b,c  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

finite difference time domain (FDTD); near field nanopatterning; non spherical particle

Indexed keywords

ETCHING; FINITE DIFFERENCE TIME DOMAIN METHOD; POLYMERS;

FINITE -DIFFERENCE TIME DOMAINS (FDTD); FINITE DIFFERENCE TIME DOMAIN SIMULATIONS; NANOPATTERNING; NONSPHERICAL PARTICLE; POLYMER PARTICLES; POLYMER SPHERES; SHIELDING EFFECT; ULTRAVIOLET-OZONE TREATMENT;

TIME DOMAIN ANALYSIS;

EID: 84903289397     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/27/275303     Document Type: Article

References (45)

1. Tao S L and Desai T A 2003 Microfabricated drug delivery systems: from particles to pores Adv. Drug Deliv. Rev. 55 315-28 (Pubitemid 36293790)
2. Slomkowski S, Basinska T and Miksa B 2002 New types of microspheres and microsphere-related materials for medical diagnostics Polymers Adv. Technol. 13 905-18
3. Reitsma M, Craig V and Biggs S 2000 Elasto-plastic and visco-elastic deformations of a polymer sphere measured using colloid probe and scanning electron microscopy Int. J. Adhe. Adhe. 20 445-8
4. Vlasov Y A, Bo X Z, Sturm J C and Norris D J 2001 On-chip natural assembly of silicon photonic bandgap crystals Nature 414 289-93 (Pubitemid 33097801)
5. Arsenault A C, Puzzo D P, Manners I and Ozin G A 2007 Photonic-crystal full-colour displays Nat. Photonics 1 468-72
6. Jang I B, Sung J H, Choi H J and Chin I 2005 Synthesis and characterization of titania coated polystyrene core-shell spheres for electronic ink Synth. Met. 152 9-12 (Pubitemid 41277845)
7. Nisisako T, Torii T, Takahashi T and Takizawa Y 2006 Synthesis of monodisperse bicolored janus particles with electrical anisotropy using a microfluidic co-flow system Adv. Mater. 18 1152-6
8. Xia Y, Gates B, Yin Y and Lu Y 2000 Monodispersed colloidal spheres: old materials with new applications Adv. Mater. 12 693-713
9. Xia Y, Gates B and Li Z Y 2001 Self-assembly approaches to three-dimensional photonic crystals Adv. Mater. 13 409-13 (Pubitemid 32327251)
10. Hosein I D and Liddell C M 2007 Convectively assembled nonspherical mushroom cap-based colloidal crystals Langmuir 23 8810-4 (Pubitemid 47294290)
11. Geng Y, Dalhaimer P, Cai S, Tsai R, Tewari M, Minko T and Discher D E 2007 Shape effects of filaments versus spherical particles in flow and drug delivery Nat. Nanotechnol. 2 249-55 (Pubitemid 46739812)
12. Decuzzi P, Godin B, Tanaka T, Lee S Y, Chiappini C, Liu X and Ferrari M 2010 Size and shape effects in the biodistribution of intravascularly injected particles J. Control Release 141 320-7
13. Park J-H, von Maltzahn G, Zhang L, Schwartz M P, Ruoslahti E, Bhatia S N and Sailor M J 2008 Magnetic iron oxide nanoworms for tumor targeting and imaging Adv. Mater. 20 1630-5
14. Doshi N and Mitragotri S 2010 Needle-shaped polymeric particles induce transient disruption of cell membranes J. R. Soc. Interface 7 S403-10
15. Tsai Y C, Fardel R, Panczyk M M, Furst E M and Arnold C B 2013 Non-spherical particles for optical trap assisted nanopatterning Nanotechnology 24 375303
16. Nie Z, Xu S, Seo M, Lewis P C and Kumacheva E 2005 Polymer particles with various shapes and morphologies produced in continuous microfluidic reactors J. Am. Chem. Soc. 127 8058-63 (Pubitemid 40799660)
17. Dendukuri D, Tsoi K, Hatton T A and Doyle P S 2005 Controlled synthesis of nonspherical microparticles using microfluidics Langmuir 21 2113-6 (Pubitemid 40421854)
18. Dendukuri D, Pregibon D C, Collins J, Hatton T A and Doyle P S 2006 Continuous-flow lithography for high-throughput microparticle synthesis Nat. Mater. 5 365-9
19. Rolland J P, Maynor B W, Euliss L E, Exner A E, Denison G M and DeSimone J M 2005 Direct fabrication and harvesting of monodisperse, shape-specific nanobiomaterials J. Am. Chem. Soc. 127 10096-100 (Pubitemid 40995455)
20. Lu Y, Yin Y and Xia Y 2001 Preparation and characterization of micrometer-sized 'egg shells' Adv. Mater. 13 271-4 (Pubitemid 32255139)
21. Champion J A, Katare Y K and Mitragotri S 2007 Making polymeric micro- and nanoparticles of complex shapes Proc. Natl Acad. Sci. USA 104 11901-4 (Pubitemid 47185602)
22. Hu Y, Ge J, Zhang T and Yin Y 2008 A blown film process to disk-shaped polymer ellipsoids Adv. Mater. 20 4599-602
23. Peng X and Kamiya I 2009 Nanohole 3D-size tailoring through polystyrene bead combustion during thin film deposition Appl. Surf. Sci. 255 4384-8
24. Klein M J, Guillaumee M, Wenger B, Andrea Dunbar L, Brugger J, Heinzelmann H and Pugin R 2010 Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold films for plasmonics Nanotechnology 21 205301
25. Hulteen J C and Van Duyne R P 1995 Nanosphere lithography: a materials general fabrication process for periodic particle array surfaces J. Vac. Sci. Technol. A 13 1553-8
26. Aizpurua J, Hanarp P, Sutherland D, Käll M, Bryant G and García de Abajo F 2003 Optical properties of gold nanorings Phys. Rev. Lett. 90 057401
27. Larsson E M, Alegret J, Kall M and Sutherland D S 2007 Sensing characteristics of NIR localized surface plasmon resonances in gold nanorings for application as ultrasensitive biosensors Nano Lett. 7 1256-63 (Pubitemid 46834406)
28. Ye J, Hutchison J A, Uji-i H, Hofkens J, Lagae L, Maes G, Borghs G and Van Dorpe P 2012 Excitation wavelength dependent surface enhanced Raman scattering of 4-aminothiophenol on gold nanorings Nanoscale 4 1606-11
29. Haes A J, Haynes C L, McFarland A D, Schatz G C, Van Duyne R P and Zou S 2005 Plasmonic materials for surface-enhanced sensing and spectroscopy MRS Bull. 30 368-75 (Pubitemid 43827714)
30. Whitney A V, Myers B D and Van Duyne R P 2004 Sub-100 nm triangular nanopores fabricated with the reactive ion etching variant of nanosphere lithography and angle-resolved nanosphere lithography Nano Lett. 4 1507-11 (Pubitemid 39186339)
31. Hulteen J C, Young M A and Van Duyne R P 2006 Surface-enhanced hyper-Raman scattering (SEHRS) on ag film over nanosphere (FON) electrodes: surface symmetry of centrosymmetric adsorbates Langmuir 22 10354-64 (Pubitemid 46051713)
32. Baumberg J J, Kelf T A, Sugawara Y, Cintra S, Abdelsalam M E, Bartlett P N and Russell A E 2005 Angle-resolved surface-enhanced Raman scattering on metallic nanostructured plasmonic crystals Nano Lett. 5 2262-7 (Pubitemid 41698950)
33. Huang C J, Ye J, Wang S, Stakenborg T and Lagae L 2012 Gold nanoring as a sensitive plasmonic biosensor for on-chip DNA detection Appl. Phys. Lett. 100 173114
34. Langhammer C, Yuan Z, Zoric I and Kasemo B 2006 Plasmonic properties of supported Pt and Pd nanostructures Nano Lett. 6 833-8
35. Jiang P and McFarland M J 2005 Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals J. Am. Chem. Soc. 127 3710-1 (Pubitemid 40411407)
36. Ye J, Van Dorpe P, Van Roy W, Lodewijks K, De Vlaminck I, Maes G and Borghs G 2009 Fabrication and optical properties of gold semishells J. Phys. Chem. C 113 3110-5
37. Ye J, Van Dorpe P, Van Roy W, Borghs G and Maes G 2009 Fabrication, characterization, and optical properties of gold nanobowl submonolayer structures Langmuir 25 1822-7
38. Lee Y-I, Park K H, Lee J, Lee C-S, Yoo H J, Kim J and Yoon Y-S 1997 Dry release for surface micromachining with HF vapor-phase etching J. Microelectromech. Systems 6 226-33 (Pubitemid 127603950)
39. Herbert S, Shinozaki D M and Collacott R J 1996 Fine-scale morphology of ultraviolet-ozone etched polyethylene J. Mater. Sci. 31 4655-61 (Pubitemid 126711733)
40. Wang Z, Hong M, Luk'yanchuk B, Lin Y, Wang Q and Chong T 2004 Angle effect in laser nanopatterning with particle-mask J. Appl. Phys. 96 6845-50 (Pubitemid 44938287)
41. Mcleod E and Arnold C B 2008 Subwavelength direct-write nanopatterning using optically trapped microspheres Nat. Nanotechnology 3 413-7
42. Huang S, Hong M, Luk'yanchuk B, Zheng Y, Song W, Lu Y and Chong T 2002 Pulsed laser-assisted surface structuring with optical near-field enhanced effects J. Appl. Phys. 92 2495-500 (Pubitemid 35037849)
43. Devilez A, Bonod N, Wenger J, Gérard D, Stout B, Rigneault H and Popov E 2009 Three-dimensional subwavelength confinement of light with dielectric microspheres Optics Express 17 2089-94
44. Piglmayer K, Denk R and Bäuerle D 2002 Laser-induced surface patterning by means of microspheres Appl. Phys. Lett. 80 4693-5 (Pubitemid 34783137)
45. Zhou Y, Hong M, Fuh J, Lu L, Luk'yanchuk B, Wang Z, Shi L and Chong T 2006 Direct femtosecond laser nanopatterning of glass substrate by particle-assisted near-field enhancement Appl. Phys. Lett. 88 023110 (Pubitemid 43839183)